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物理汽相淀积薄膜的微结构和内应力 被引量:8
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作者 朱贤方 J.S.Wiliams +2 位作者 l.c.lim SamZhang 吴自勤 《物理》 CAS 1998年第1期37-40,47,共5页
文章综述的内容为:(1)物理汽相淀积(PVD)薄膜的微结构;(2)PVD薄膜的内应力;(3)膜的微结构和内应力的关系.着重介绍制备参数对微结构、内应力和两者之间的主要联系的影响.
关键词 PVD薄膜 微结构 内应力 薄膜制备
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Pb(Zn_(1/3)Nb_(2/3))O_(3)–PbTiO_(3) single crystal and device development
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作者 l.c.lim S.Zhang +2 位作者 Y.X.Xia D.H.Lin N.H.L.Goh 《Journal of Advanced Dielectrics》 CAS 2014年第1期1-5,共5页
This paper describes recent device developments with relaxor ferroelectric Pb(Zn_(1/3)Nb_(2/3))O_(3)-PbTiO_(3)(PZN–PT)single crystals carried out at Microfine Materials Technologies Pte.Ltd,Singapore.Promising[011]-p... This paper describes recent device developments with relaxor ferroelectric Pb(Zn_(1/3)Nb_(2/3))O_(3)-PbTiO_(3)(PZN–PT)single crystals carried out at Microfine Materials Technologies Pte.Ltd,Singapore.Promising[011]-poled transverse cuts of PZN–PT single crystals and the results on the effect of electric field and axial compressive stress on the rhombohedral-to-orthorhombic(R–O)phase transformation behavior of such cuts are presented and discussed.The single crystal devices described include a compact lowfrequency broadband power-efficient underwater tonpilz projector,high sensitivity shear accelerometers and acoustic vector sensors(AVS).The unique characteristics offered by these PZN–PT single crystal devices are highlighted,which serve as examples of newgeneration piezoelectric devices and systems for a wide range of demanding applications. 展开更多
关键词 PZN-PT single crystal piezoelectric properties underwater projector ACCELEROMETER acoustic vector sensor.
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