By introducing multi-leaf sectorial holes into an oxidation confined 850 nm vertical cavity surface emitting laser(VCSEL),the far-field divergence angle is reduced.The finite-difference time-domain method is used to s...By introducing multi-leaf sectorial holes into an oxidation confined 850 nm vertical cavity surface emitting laser(VCSEL),the far-field divergence angle is reduced.The finite-difference time-domain method is used to simulate the far-field pattern of the multi-leaf holey VCSEL with different etching depths and different shapes of the oxide aperture in diameter R.Based on the simulation result,we design and fabricate a multi−leaf holey VCSEL and its divergence angle is only 6°.The experimental results agree well with the theoretical predication.展开更多
基金by the National High Technology Research and Development Program of China under Grant No 2008AA03Z402the National Natural Science Foundation of China under Grant No 61076044the Natural Science Foundation of Beijing under Grant Nos 4092007,4102003 and 4112006.
文摘By introducing multi-leaf sectorial holes into an oxidation confined 850 nm vertical cavity surface emitting laser(VCSEL),the far-field divergence angle is reduced.The finite-difference time-domain method is used to simulate the far-field pattern of the multi-leaf holey VCSEL with different etching depths and different shapes of the oxide aperture in diameter R.Based on the simulation result,we design and fabricate a multi−leaf holey VCSEL and its divergence angle is only 6°.The experimental results agree well with the theoretical predication.