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基于降低有机场效应晶体管泄漏电流的研究进展 被引量:2
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作者 林雪梅 李蒙蒙 +1 位作者 龙世兵 李泠 《半导体技术》 CAS 北大核心 2021年第9期665-674,共10页
近年来,由于有机场效应晶体管(OFET)具有成本低、机械柔性优异且可大面积制备等优点成为国际研究的前沿领域之一。迄今为止,OFET的载流子迁移率已超过了非晶硅薄膜晶体管,在柔性集成电路中表现出了巨大的应用潜力。随着技术的不断改进,O... 近年来,由于有机场效应晶体管(OFET)具有成本低、机械柔性优异且可大面积制备等优点成为国际研究的前沿领域之一。迄今为止,OFET的载流子迁移率已超过了非晶硅薄膜晶体管,在柔性集成电路中表现出了巨大的应用潜力。随着技术的不断改进,OFET的工作频率不断提高。首先阐述了泄漏电流的来源;然后介绍了影响OFET静态功耗的最主要因素是栅极泄漏电流,总结了近年来降低OFET栅极泄漏电流的主要方法,如构建多层结构的栅介质、开发新型栅介质材料和交联栅介质材料;最后对降低OFET泄漏电流的方法进行了展望。 展开更多
关键词 有机场效应晶体管(OFET) 静态功耗 泄漏电流 栅介质层 界面工程
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碳掺杂对28 nm PMOS器件性能的影响
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作者 吉忠浩 阎大勇 +4 位作者 龙世兵 薛景星 徐广伟 肖印长 娄世殊 《微电子学》 CAS 北大核心 2019年第1期136-139,145,共5页
基于28nm Polysion工艺,研究了在轻掺杂源漏区(LDD)提升掺杂浓度与掺杂碳源对PMOS器件的影响。实验结果表明,掺杂碳原子可以有效抑制硼的瞬时增强扩散效应(TED),并有效降低器件结深,降低漏电流。在P型轻掺杂源漏区(PLDD)提升掺杂浓度,... 基于28nm Polysion工艺,研究了在轻掺杂源漏区(LDD)提升掺杂浓度与掺杂碳源对PMOS器件的影响。实验结果表明,掺杂碳原子可以有效抑制硼的瞬时增强扩散效应(TED),并有效降低器件结深,降低漏电流。在P型轻掺杂源漏区(PLDD)提升掺杂浓度,可以有效提高电路速度,但会导致更严重的硼扩散与漏电流。通过研究不同浓度的碳原子与PLDD浓度对器件的影响,选取合适的碳源掺杂浓度并提高PLDD的掺杂浓度,在同样饱和电流的情况下器件具有更小的漏电流,可以提升PMOS器件的饱和电流与漏电流(Ion-Ioff)性能约6%。 展开更多
关键词 28nm 碳掺杂 PLDD掺杂浓度 PMOS器件
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28 nm PMOS器件中Ge注入对NBTI可靠性的影响
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作者 万雨石 龙世兵 +1 位作者 蔡巧明 杨列勇 《微电子学》 CAS 北大核心 2019年第3期413-417,共5页
研究了28 nm多晶硅栅工艺中Ge注入对PMOS器件的负偏压温度不稳定性(NBTI)的影响。在N阱中注入Ge,制作了具有SiGe沟道的PMOS量子阱器件。针对不同栅氧厚度和不同应力条件的器件,采用动态测量方法测量了NBTI的退化情况,采用电荷泵方法测... 研究了28 nm多晶硅栅工艺中Ge注入对PMOS器件的负偏压温度不稳定性(NBTI)的影响。在N阱中注入Ge,制作了具有SiGe沟道的PMOS量子阱器件。针对不同栅氧厚度和不同应力条件的器件,采用动态测量方法测量了NBTI的退化情况,采用电荷泵方法测量了界面态的变化情况。实验结果表明,由于Ge的注入,PMOS器件中饱和漏电流的退化量降低了43%,同时应力过程中产生的界面态得到减少,有效提高了PMOS器件的NBTI可靠性。 展开更多
关键词 负偏压温度不稳定性 量子阱器件 器件可靠性
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应力记忆工艺优化对NMOS器件性能的改善
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作者 卢小雨 蔡巧明 +4 位作者 龙世兵 张烨 张陶娜 杨菁国 张云香 《微电子学》 CAS 北大核心 2019年第2期279-283,共5页
应力记忆工艺(SMT)通过在NMOS器件沟道中产生张应力,提高器件的电子迁移率,从而提升NMOS器件的性能。Si_3N_4层应力值、SiO_2层厚度以及退火顺序等三种因素,均对NMOS器件的性能产生影响,增加了SMT工艺应用的难度。对三组实验结果进行分... 应力记忆工艺(SMT)通过在NMOS器件沟道中产生张应力,提高器件的电子迁移率,从而提升NMOS器件的性能。Si_3N_4层应力值、SiO_2层厚度以及退火顺序等三种因素,均对NMOS器件的性能产生影响,增加了SMT工艺应用的难度。对三组实验结果进行分析,研究了三种因素对NMOS器件性能的影响,优化了工艺条件。结果表明,NMOS器件应用SMT工艺后,饱和漏极电流-关态漏极电流(I_(dsat)-I_(off))较传统NMOS器件提高了6%。 展开更多
关键词 应力记忆工艺 NMOS器件 饱和漏极电流-关态漏极电流
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An overview of resistive random access memory devices 被引量:9
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作者 LI YingTao long shibing +3 位作者 LIU Qi LU HangBing LIU Su LIU Ming 《Chinese Science Bulletin》 SCIE EI CAS 2011年第28期3072-3078,共7页
With recent progress in material science, resistive random access memory (RRAM) devices have attracted interest for nonvolatile, low-power, nondestructive readout, and high-density memories. Relevant performance param... With recent progress in material science, resistive random access memory (RRAM) devices have attracted interest for nonvolatile, low-power, nondestructive readout, and high-density memories. Relevant performance parameters of RRAM devices include operating voltage, operation speed, resistance ratio, endurance, retention time, device yield, and multilevel storage. Numerous resistive-switching mechanisms, such as conductive filament, space-charge-limited conduction, trap charging and discharging, Schottky Emission, and Pool-Frenkel emission, have been proposed to explain the resistive switching of RRAM devices. In addition to a discussion of these mechanisms, the effects of electrode materials, doped oxide materials, and different configuration devices on the resistive-switching characteristics in nonvolatile memory applications, are reviewed. Finally, suggestions for future research, as well as the challenges awaiting RRAM devices, are given. 展开更多
关键词 随机存取存储器 电阻式 记忆体 装置 非破坏性读出 非易失性 肖特基发射 氧化物材料
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Improving the electrical performance of resistive switching memory using doping technology 被引量:6
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作者 WANG Yan LIU Oi +7 位作者 LU HangBing long shibing WANG Wei LI YingTao ZHANG Sen LIAN WenTai YANG JianHong LIU Ming 《Chinese Science Bulletin》 SCIE CAS 2012年第11期1235-1240,共6页
In this paper, improvements of resistive random access memory (RRAM) using doping technology are summarized and analyzed. Based on a Cu/ZrO2/Pt device, three doping technologies with Ti ions, Cu, and Cu nanocrystal, r... In this paper, improvements of resistive random access memory (RRAM) using doping technology are summarized and analyzed. Based on a Cu/ZrO2/Pt device, three doping technologies with Ti ions, Cu, and Cu nanocrystal, respectively, are adopted in the experiments. Compared to an undoped device, improvements focus on four points: eliminating the electroforming process, reducing operation voltage, improving electrical uniformity, and increasing device yield. In addition, thermal stability of the high resistance state and better retention are also achieved by the doping technology. We demonstrate that doping technology is an effective way of improving the electrical performance of RRAM. 展开更多
关键词 掺杂技术 电气性能 电阻式 记忆体 兴奋剂 随机存取存储器 纳米晶体 电铸工艺
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Analyzing trap generation in silicon-nanocrystal memory devices using capacitance and current measurement 被引量:3
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作者 YANG XiaoNan ZHANG ManHong +5 位作者 WANG Yong HUO ZongLiang long shibing ZHANG Bo LIU Jing LIU Ming 《Science China(Technological Sciences)》 SCIE EI CAS 2012年第3期588-593,共6页
The combination of capacitance-and current-voltage(CV/IV) measurements is used to analyze trap generation in silicon-nanocrystal memory devices during Fowler-Nordheim(FN) programming/erasing cycling.CV and IV curves a... The combination of capacitance-and current-voltage(CV/IV) measurements is used to analyze trap generation in silicon-nanocrystal memory devices during Fowler-Nordheim(FN) programming/erasing cycling.CV and IV curves are measured after certain P/E cycles.The flatband voltage(Vfb) and the threshold voltage(Vth) are extracted from CV curves by solving one-dimensional Schr?dinger and Poisson equations.Both hole and electron trappings are observed in the tunneling SiO2.They show up in the accumulation and the inversion,respectively.By fitting FN tunneling current,the area densities of cycling-induced electron traps in the blocking oxide and in the tunneling oxide are finally determined. 展开更多
关键词 电流测量 电子陷阱 电容 器件 内存 纳米 阈值电压 循环过程
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Approaches for improving the performance of filament-type resistive switching memory 被引量:2
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作者 LIAN WenTai long shibing +8 位作者 LU HangBing LIU Qi LI YingTao ZHANG Sen WANG Yan HUO ZongLiang DAI YueHua CHEN JunNing LIU Ming 《Chinese Science Bulletin》 SCIE EI CAS 2011年第4期461-464,共4页
Resistive random access memory (RRAM) has received significant research interest because of its promising potential in terms of down-scaling,high density,high speed and low power. However,its endurance,retention and u... Resistive random access memory (RRAM) has received significant research interest because of its promising potential in terms of down-scaling,high density,high speed and low power. However,its endurance,retention and uniformity are still imperfect. In this article,the physical mechanisms of filament-type RRAM and the approaches for improving the switching performance,including doping,process optimization and interface engineering,are introduced. 展开更多
关键词 开关性能 记忆体 电阻式 灯丝 随机存取 物理机制 界面工程 工艺优化
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