Si_(1-x)Ge_(x)/Si single-mode rib waveguides with 0.5dB/cm losses have been fabricated,in which the SiGe layers are grown by molecular beam epitaxy.The single-mode waveguide dimensions determined experimentally are co...Si_(1-x)Ge_(x)/Si single-mode rib waveguides with 0.5dB/cm losses have been fabricated,in which the SiGe layers are grown by molecular beam epitaxy.The single-mode waveguide dimensions determined experimentally are consistent with the single-mode theory of SiGe waveguides.展开更多
文摘Si_(1-x)Ge_(x)/Si single-mode rib waveguides with 0.5dB/cm losses have been fabricated,in which the SiGe layers are grown by molecular beam epitaxy.The single-mode waveguide dimensions determined experimentally are consistent with the single-mode theory of SiGe waveguides.
