衬底减薄可以大幅提升SiC结势垒肖特基(JBS)二极管的电流密度,但减薄工艺和减薄引入的激光退火工艺仍面临巨大挑战。使用不同型号的金刚砂轮模拟了SiC衬底减薄精磨过程,研究了精磨后SiC衬底的界面质量;同时,使用波长为355 nm的紫外激光...衬底减薄可以大幅提升SiC结势垒肖特基(JBS)二极管的电流密度,但减薄工艺和减薄引入的激光退火工艺仍面临巨大挑战。使用不同型号的金刚砂轮模拟了SiC衬底减薄精磨过程,研究了精磨后SiC衬底的界面质量;同时,使用波长为355 nm的紫外激光器退火Ni/4H-SiC结构,分析了激光能量密度对欧姆接触的性能影响;最后,结合减薄工艺和激光退火工艺制备了厚度为100μm的1 200 V/15 A SiC JBS二极管。结果表明,使用超精细砂轮精磨SiC衬底后,其表面粗糙度为1.26 nm,纵向损伤层厚度约为60 nm;当激光能量密度为1.8 J/cm^(2)时,能形成良好的欧姆接触,比接触电阻率为7.42×10^(-5)Ω·cm^(2);厚度减薄至100μm的1 200 V/15 A SiC JBS二极管在不损失阻断性能的情况下,其正向导通压降比未减薄的减小了0.15 V,电流密度提升了41.27%。展开更多
Residual microstresses in particle reinforced alumina/SiC and alumina/mullite composites were calcu- lated. The results indicated that there existed a linear relation between matrix microstresses and the particle cont...Residual microstresses in particle reinforced alumina/SiC and alumina/mullite composites were calcu- lated. The results indicated that there existed a linear relation between matrix microstresses and the particle contents in the composites. The influence of stress state on crack propagating and grain boundary strengthening was analyzed. Ratios of grain boundary toughness to grain toughness of these composites were calculated in view of microstress analysis, and percentage of transgranular fracture (PTF) that increases with the microstress in the alumina matrix was then deduced. The relationship between microstructure, component, matrix microstresses, and PTF was established. Therefore, the fracture characteristic was predicted on basis of the particle content and distribution in addition to the microstructure of the composites.展开更多
文摘衬底减薄可以大幅提升SiC结势垒肖特基(JBS)二极管的电流密度,但减薄工艺和减薄引入的激光退火工艺仍面临巨大挑战。使用不同型号的金刚砂轮模拟了SiC衬底减薄精磨过程,研究了精磨后SiC衬底的界面质量;同时,使用波长为355 nm的紫外激光器退火Ni/4H-SiC结构,分析了激光能量密度对欧姆接触的性能影响;最后,结合减薄工艺和激光退火工艺制备了厚度为100μm的1 200 V/15 A SiC JBS二极管。结果表明,使用超精细砂轮精磨SiC衬底后,其表面粗糙度为1.26 nm,纵向损伤层厚度约为60 nm;当激光能量密度为1.8 J/cm^(2)时,能形成良好的欧姆接触,比接触电阻率为7.42×10^(-5)Ω·cm^(2);厚度减薄至100μm的1 200 V/15 A SiC JBS二极管在不损失阻断性能的情况下,其正向导通压降比未减薄的减小了0.15 V,电流密度提升了41.27%。
文摘Residual microstresses in particle reinforced alumina/SiC and alumina/mullite composites were calcu- lated. The results indicated that there existed a linear relation between matrix microstresses and the particle contents in the composites. The influence of stress state on crack propagating and grain boundary strengthening was analyzed. Ratios of grain boundary toughness to grain toughness of these composites were calculated in view of microstress analysis, and percentage of transgranular fracture (PTF) that increases with the microstress in the alumina matrix was then deduced. The relationship between microstructure, component, matrix microstresses, and PTF was established. Therefore, the fracture characteristic was predicted on basis of the particle content and distribution in addition to the microstructure of the composites.
