A systematic investigation was carried out to observe the deposition rate of a diamond-like carbon(DLC) coating on two stainless steel substrates by chemical vapor deposition(CVD). The objective of this research is to...A systematic investigation was carried out to observe the deposition rate of a diamond-like carbon(DLC) coating on two stainless steel substrates by chemical vapor deposition(CVD). The objective of this research is to study the deposition behavior of the DLC coating and its tribological properties in different combinations of methane(CH_4) and nitrogen, which were used as precursor gases. The results reveal that the deposition rate increases with increasing CH_4 content up to 50 vol%. The hardness of the DLC-deposited layer also increases while the friction coefficient decreases with increasing CH_4 gas content up to 50% in the precursor gas mixture.展开更多
基金the financial support to this research by the research and development fund of Dhaka University of Engineering and Technology,Bangladesh
文摘A systematic investigation was carried out to observe the deposition rate of a diamond-like carbon(DLC) coating on two stainless steel substrates by chemical vapor deposition(CVD). The objective of this research is to study the deposition behavior of the DLC coating and its tribological properties in different combinations of methane(CH_4) and nitrogen, which were used as precursor gases. The results reveal that the deposition rate increases with increasing CH_4 content up to 50 vol%. The hardness of the DLC-deposited layer also increases while the friction coefficient decreases with increasing CH_4 gas content up to 50% in the precursor gas mixture.
