Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent years.Multiphoton lithography(MPL)is one of the most promising 3D nanomanuf...Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent years.Multiphoton lithography(MPL)is one of the most promising 3D nanomanufacturing technologies,which has been widely used in manufacturing micro-optics,photonic crystals,microfluidics,meta-surface,and mechanical metamaterials.Despite of tremendous potential of MPL in laboratorial and industrial applications,simultaneous achievement of high throughput,high accuracy,high design freedom,and a broad range of material structuring capabilities remains a long-pending challenge.To address the issue,we propose an acousto-optic scanning with spatial-switching multispots(AOSS)method.Inertia-free acousto-optic scanning and nonlinear swept techniques have been developed for achieving ultrahigh-speed and aberration-free scanning.Moreover,a spatial optical switch concept has been implemented to significantly boost the lithography throughput while maintaining high resolution and high design freedom.An eight-foci AOSS system has demonstrated a record-high 3D printing rate of 7.6×10^(7)voxel s^(-1),which is nearly one order of magnitude higher than earlier scanning MPL,exhibiting its promise for future scalable 3D nanomanufacturing.展开更多
Multispectral and polarized focusing and imaging are key functions that are vitally important for a broad range of optical applications.Conventional techniques generally require multiple shots to unveil desired optica...Multispectral and polarized focusing and imaging are key functions that are vitally important for a broad range of optical applications.Conventional techniques generally require multiple shots to unveil desired optical information and are implemented via bulky multi-pass systems or mechanically moving parts that are difficult to integrate into compact and integrated optical systems.Here,a design of ultra-compact transversely dispersive metalens capable of both spectrum and polarization ellipticity recognition and reconstruction in just a single shot is demonstrated with both coherent and incoherent light.Our design is well suited for integrated and high-speed optical information analysis and can significantly reduce the size and weight of conventional devices while simplifying the process of collecting optical information,thereby promising for various applications,including machine vision,minimized spectrometers,material characterization,remote sensing,and other areas which require comprehensive optical analysis.展开更多
基金National Key Research and Development Program of China(2021YFF0502700)National Natural Science Foundation of China(52275429,62205117)+4 种基金Innovation project of Optics Valley Laboratory(OVL2021ZD002)Hubei Provincial Natural Science Foundation of China(2022CFB792)Young Elite Scientists Sponsorship Program by CAST(2022QNRC001)West Light Foundation of the Chinese Academy of Sciences(xbzg-zdsys-202206)Knowledge Innovation Program of Wuhan-Shuguang。
文摘Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent years.Multiphoton lithography(MPL)is one of the most promising 3D nanomanufacturing technologies,which has been widely used in manufacturing micro-optics,photonic crystals,microfluidics,meta-surface,and mechanical metamaterials.Despite of tremendous potential of MPL in laboratorial and industrial applications,simultaneous achievement of high throughput,high accuracy,high design freedom,and a broad range of material structuring capabilities remains a long-pending challenge.To address the issue,we propose an acousto-optic scanning with spatial-switching multispots(AOSS)method.Inertia-free acousto-optic scanning and nonlinear swept techniques have been developed for achieving ultrahigh-speed and aberration-free scanning.Moreover,a spatial optical switch concept has been implemented to significantly boost the lithography throughput while maintaining high resolution and high design freedom.An eight-foci AOSS system has demonstrated a record-high 3D printing rate of 7.6×10^(7)voxel s^(-1),which is nearly one order of magnitude higher than earlier scanning MPL,exhibiting its promise for future scalable 3D nanomanufacturing.
基金We are grateful for financial supports from National Key Research and Development Program of China(Grant No.2021YFF0502700)National Natural Science Foundation of China(Grant Nos.52275429,62205117,61835008)+1 种基金Knowledge Innovation Program of Wuhan-Shuguang,Innovation project of Optics Valley Laboratory(Grant No.OVL2021ZD002)Hubei Provincial Natural Science Foundation of China(Grant Nos.2020CFA004,2022CFB792).
文摘Multispectral and polarized focusing and imaging are key functions that are vitally important for a broad range of optical applications.Conventional techniques generally require multiple shots to unveil desired optical information and are implemented via bulky multi-pass systems or mechanically moving parts that are difficult to integrate into compact and integrated optical systems.Here,a design of ultra-compact transversely dispersive metalens capable of both spectrum and polarization ellipticity recognition and reconstruction in just a single shot is demonstrated with both coherent and incoherent light.Our design is well suited for integrated and high-speed optical information analysis and can significantly reduce the size and weight of conventional devices while simplifying the process of collecting optical information,thereby promising for various applications,including machine vision,minimized spectrometers,material characterization,remote sensing,and other areas which require comprehensive optical analysis.
