A new membrane type Al_2O_3 micromachining material is used.We develop an environmental multi-parameter detection micro-system,which implements the detection to temperature,humidity,wind speed,and CO.The test results ...A new membrane type Al_2O_3 micromachining material is used.We develop an environmental multi-parameter detection micro-system,which implements the detection to temperature,humidity,wind speed,and CO.The test results illustrate that the heat-release unit in micro-system intercross greatly affects other sensing units on the temperature.We study the method of etching process,which formed cavity to reduce the heat exchange efficiency and decrease temperature intercross effect.展开更多
Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array styl...Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array style suspending bridge structure.We have studied on time-sequence modulation form voltage pulse heating method which forms different work temperature展开更多
文摘A new membrane type Al_2O_3 micromachining material is used.We develop an environmental multi-parameter detection micro-system,which implements the detection to temperature,humidity,wind speed,and CO.The test results illustrate that the heat-release unit in micro-system intercross greatly affects other sensing units on the temperature.We study the method of etching process,which formed cavity to reduce the heat exchange efficiency and decrease temperature intercross effect.
文摘Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array style suspending bridge structure.We have studied on time-sequence modulation form voltage pulse heating method which forms different work temperature
