In order to realize the micromation of position sensors, and extend the application area into micro scale, this paper designs a novel micro position sensor, Mace SAW (Surface Acoustic Wave) position sensor, which can ...In order to realize the micromation of position sensors, and extend the application area into micro scale, this paper designs a novel micro position sensor, Mace SAW (Surface Acoustic Wave) position sensor, which can be fabricated with MEMS technology. Its key components are IDTs (Interdigital Transducers) and reflective grooves. The structure and working principles of the sensor are introduced theoretically, and the manufacture process is then put forward.展开更多
文摘In order to realize the micromation of position sensors, and extend the application area into micro scale, this paper designs a novel micro position sensor, Mace SAW (Surface Acoustic Wave) position sensor, which can be fabricated with MEMS technology. Its key components are IDTs (Interdigital Transducers) and reflective grooves. The structure and working principles of the sensor are introduced theoretically, and the manufacture process is then put forward.
