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Direct Growth of Graphene on Silicon by Metal-Free Chemical Vapor Deposition 被引量:5
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作者 lixuan tai Daming Zhu +7 位作者 Xing Liu Tieying Yang Lei Wang Rui Wang Sheng Jiang Zhenhua Chen Zhongmin Xu Xiaolong Li 《Nano-Micro Letters》 SCIE EI CAS 2018年第2期12-20,共9页
The metal-free synthesis of graphene on singlecrystal silicon substrates, the most common commercial semiconductor, is of paramount significance for many technological applications. In this work, we report the growth ... The metal-free synthesis of graphene on singlecrystal silicon substrates, the most common commercial semiconductor, is of paramount significance for many technological applications. In this work, we report the growth of graphene directly on an upside-down placed,single-crystal silicon substrate using metal-free, ambientpressure chemical vapor deposition. By controlling the growth temperature, in-plane propagation, edge-propagation, and core-propagation, the process of graphene growth on silicon can be identified. This process produces atomically flat monolayer or bilayer graphene domains, concave bilayer graphene domains, and bulging few-layer graphene domains. This work would be a significant step toward the synthesis of large-area and layer-controlled, high-quality graphene on single-crystal silicon substrates. 展开更多
关键词 GRAPHENE SILICON Metal-free CVD Domain growth
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