Negative capacitance(NC)has the potential to enable low power microelectronics beyond the fundamental thermionic limit,and it has been theorized that the thermodynamically unstable NC of ferroelectrics can be stabiliz...Negative capacitance(NC)has the potential to enable low power microelectronics beyond the fundamental thermionic limit,and it has been theorized that the thermodynamically unstable NC of ferroelectrics can be stabilized by linear dielectric,making negative capacitance ferroelectric field effect transistors(NC-FeFET)possible.Nevertheless,the validity of NC as a physical concept for ferroelectrics remain contentious despite numerous theoretical and experimental investigations,and the intrinsic ferroelectric NC with suppressed polarization has not been demonstrated except locally at vortex core.While NC-FeFET with subthreshold swing(SS)lower than 60 mV/dec limit has been reported,such device characteristics has not been directly connected to suppressed polarization at materials’level,and alternative mechanisms other than NC have also been proposed.Here we demonstrate stable sub-60 mV/dec SS with hysteresis free Isingle bondV in NC-FeFET based on SrTiO_(3)/Pb(Zr_(0.1)Ti_(0.9))O_(3)/SrTiO_(3) heterostructure,and observe its suppressed polarization at both macroscopic and microscopic scales.The intrinsic ferroelectric NC thus is experimentally confirmed and directly connected to NC-FeFET performance,and the mica-based device is also highly flexible and robust under cyclic bending as well as extended heating.展开更多
基金We acknowledge the support of National Natural Science Foundation of China(12192213,52302142,92066203 and 92066102)Shenzhen Science and Technology Program(KQTD20170810160424889,RCYX20200714114733204,JCYJ20200109115219157 and JCYJ20200109115210307)+2 种基金Guangdong Provincial Key Laboratory Program(2021B1212040001)from the Department of Science and Technology of Guangdong Province,Guangdong Basic and Applied Basic Research Foundation(2021A1515110689)China Postdoctoral Science Foundation(2021M693281).
文摘Negative capacitance(NC)has the potential to enable low power microelectronics beyond the fundamental thermionic limit,and it has been theorized that the thermodynamically unstable NC of ferroelectrics can be stabilized by linear dielectric,making negative capacitance ferroelectric field effect transistors(NC-FeFET)possible.Nevertheless,the validity of NC as a physical concept for ferroelectrics remain contentious despite numerous theoretical and experimental investigations,and the intrinsic ferroelectric NC with suppressed polarization has not been demonstrated except locally at vortex core.While NC-FeFET with subthreshold swing(SS)lower than 60 mV/dec limit has been reported,such device characteristics has not been directly connected to suppressed polarization at materials’level,and alternative mechanisms other than NC have also been proposed.Here we demonstrate stable sub-60 mV/dec SS with hysteresis free Isingle bondV in NC-FeFET based on SrTiO_(3)/Pb(Zr_(0.1)Ti_(0.9))O_(3)/SrTiO_(3) heterostructure,and observe its suppressed polarization at both macroscopic and microscopic scales.The intrinsic ferroelectric NC thus is experimentally confirmed and directly connected to NC-FeFET performance,and the mica-based device is also highly flexible and robust under cyclic bending as well as extended heating.
