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Gas pressure effect on plasma transport in a magnetic-filtered radio-frequency plasma source
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作者 N OUDINI m m alim +1 位作者 R TADJINE A BENDIB 《Plasma Science and Technology》 SCIE EI CAS CSCD 2020年第6期103-109,共7页
Volume negative ion production relies on a magnetic filter(MF),where the plasma downstream of the MF is characterized by a strip-like pattern that consists of a bright and dense plasma region.In this work,we study,in ... Volume negative ion production relies on a magnetic filter(MF),where the plasma downstream of the MF is characterized by a strip-like pattern that consists of a bright and dense plasma region.In this work,we study,in a radio-frequency plasma source,the effects of operating pressure on this strip.This investigation,conducted using a Langmuir probe,shows that the plasma uniformity might be controlled through the gas pressure.Moreover,the operating pressure determines on which hemi-cylinder(side of magnetic field lines)the strip forms.This side inversion of the high-density plasma hemi-cylinder is due to an inversion of an ambipolar electric field that changes the E?×?B drift direction. 展开更多
关键词 magnetic filter radio-frequency plasma source Langmuir probe E×B drift ambipolar electric field
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