A piezoelectric micro active suspension device has been developed for the application of active isolation of sensitive electronic devices such as frequency generators or inertial sensors.The developed strategy is base...A piezoelectric micro active suspension device has been developed for the application of active isolation of sensitive electronic devices such as frequency generators or inertial sensors.The developed strategy is based on a classical skyhook active damper but adapted and optimised to allow robust implementation onto an adaptive microelectromechanical systems(MEMS).The micro suspension is a silicon beam structure etched in a silicon on insulator(SOI)wafer and is equipped with a pair of piezoelectric transducers obtained from a lead zirconate titanante thin film sandwiched between pairs of electrodes.High performance transducers allow application of the active isolation strategy and demonstrate the possibility to implement skyhook damping with low-voltage control level.展开更多
文摘A piezoelectric micro active suspension device has been developed for the application of active isolation of sensitive electronic devices such as frequency generators or inertial sensors.The developed strategy is based on a classical skyhook active damper but adapted and optimised to allow robust implementation onto an adaptive microelectromechanical systems(MEMS).The micro suspension is a silicon beam structure etched in a silicon on insulator(SOI)wafer and is equipped with a pair of piezoelectric transducers obtained from a lead zirconate titanante thin film sandwiched between pairs of electrodes.High performance transducers allow application of the active isolation strategy and demonstrate the possibility to implement skyhook damping with low-voltage control level.
