A New Method for Thin Film Deposition-Faced Microwave Electron Cyclotron Resonance Plasma Sources Enhanced Direct-Current Magnetron Sputtering

A new reactive magnetron sputtering system enhanced by the faced microwave electron cyclotron resonance plasma source was designed and amorphous CN_(x) films has been prepared by using this system.The character ization of the films by interference microscopy,atomic force microscopy,and x-ray photoelectron spectroscopy shows that the deposition rate is strongly affected by the direct-current bias,and the films are composed by a single carbon nitride phase and the N/C ratio is 4:3.2,which is close to that of C_(3)N_(4)(4:3).

Cubic-BN-Like Structure of B-C-N Films Synthesized by Plasma Source Ion Nitriding

Plasma source ion nitriding has emerged as a low-temperature,low-pressure nitriding approach for implanting nitrogen ions and then diffusing them into bulk materials.The ion-plating B-C films were nitrided to synthesize B-C-N films at a nitriding temperature from 300 to 500℃.The x-ray photoelectron spectroscopy and diffuse reflectance Fourier transform infrared spectra analyses showed that the amorphous B-C-N films synthesized at 500℃ are composed mainly of cubic-BN-like and hexagonal-BN-like plain microdomains.The higher nitriding temperature contributes to the formation of cubic-BN-like B-C-N structure in the B-C-N films.

Fe Nanoparticle Production by an Atmospheric Cold Plasma Jet

We present a simple method of producing Fe nanoparticles based on the dissociation of ferrocene by a simple single electrode atmospheric cold argon plasma jet. The system ＆ driven by a sinusoidal ac-supply with a peak voltage of 0-30 k V and a frequency of 50kHz. The average size of iron na^opartieles analyzed by scanning electron microscopy is about 10-30nm for the gas phase samples, and 30-l00nm for the liquid phase samples. The method should be competitive due to its simplicity and low cost.

Plasma Catalytic Synthesis of Silver Nanoparticles

We present the experimental results of plasma catalytic synthesis of colloidal silver nanoparticles,using AgNO3 as the precursor,ethanol as the solvent and reducing agent,and poly vinyl pyrrolidone(PVP)as the macromolecular surfactant.The plasma is generated by an atmospheric argon dielectric barrier discharge jet.Silver nanoparticles are produced instantly once the plasma is ignited.The system is not heated so it is necessary to use traditional chemical methods.The samples are characterized by UV−visible absorbance and transmission electron microscopy.For glow discharge mode no obvious silver nanoparticles are observed.For low voltage filamentary streamer discharge mode a lot of silver nanoparticles with the mean diameter of∼3.5 nm are generated and a further increase of the voltage causes the occurrence of agglomeration.

Diffuse Reflectance Fourier Transform Infrared Spectrometry of BN Films Deposited on Steels by Remote Microwave Plasma CVD from Borazine

The diffuse reflectance Fourier trmisfonn infrared spectra of the boron nitride(BN)films deposited on steels by remote microwave plasma chemical vapour deposition(CVD)from borazine with nitrogen,hydrogen and argon were investigated in the wavenumber range of 400-4000 cm^(-1).It was found that the cubic BN for million depends on production of the intermediate species of cyclo triborazane((BH2NH2)3)and its dehydrogenntion.The structuml bonds of cydotriborazane are similar to that of cubic BN.OptiinUiu conditions for deposited BN films were found to be the bora,zine-nitrogen mixture at the substrate tempera.ture of 550℃.The BN films were n mixture of crystalline cubic BN accounting for the major content and hexagonal BN with relatively low hydrogen content.