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Improvement of silicon etching resolution using the confined etchant layer technique
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作者 Zu, YB Xie, L +3 位作者 Tian, ZW Xie, ZX Mu, JQ mao, bw 《Chinese Science Bulletin》 SCIE EI CAS 1997年第15期1318-1319,共2页
WHEN scanning electrochemical microscopy (SECM) with feedback mode is used to etchcertain surface, the etchant molecules generated at a microelectrode diffuse to the surface andreact therein with the surface species, ... WHEN scanning electrochemical microscopy (SECM) with feedback mode is used to etchcertain surface, the etchant molecules generated at a microelectrode diffuse to the surface andreact therein with the surface species, resulting in local etching pattern. It is noted that theetching resolution of SECM is dominantly determined by the size of the microelectrode.However, many experimental results have shown the significant influence of the lateral diffu-sion of etchant on the etching resolution. Therefore, a thin diffusion layer of the 展开更多
关键词 AS SECM Improvement of silicon etching resolution using the confined etchant layer technique CELT
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Scanning electrochemical microscopy-development of instrumentation utilizing piezo-bimorph X-Y scanners
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作者 mao, bw MU, JQ +5 位作者 ZHUO, XD FENG, ZD YAN, ER PAN, GB XIE, ZX REN, B 《Chinese Journal of Chemistry》 SCIE CAS CSCD 1995年第2期105-111,共7页
The development of the instrumentation of a scanning electrochemical microscopy (SECM) is presented. The core of the SECM sensing system is constructed based on piezo-bimorph scanners, a mechanical micropositioner of ... The development of the instrumentation of a scanning electrochemical microscopy (SECM) is presented. The core of the SECM sensing system is constructed based on piezo-bimorph scanners, a mechanical micropositioner of multi-dimensional adjustment and ultramicroelectrodes. The control of the electrochemical cell and the SECM system is realized by a battery powered bipoteniostat and analog control circuits respectively with the control of a microcomputer work station. The demonstrations of SECM experiments are given on both a standard IDA sample and a silver electrode. Discussions on the resolution and quality of SECM image are made. 展开更多
关键词 SCANNING ELECTROCHEMICAL MICROSCOPY PIEZO-BIMORPH ULTRAMICROELECTRODE
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