The current study is directed to the rapidly developing field of inorganic material 3D object production at nano-/micro scale.The fabrication method includes laser lithography of hybrid organic-inorganic materials wit...The current study is directed to the rapidly developing field of inorganic material 3D object production at nano-/micro scale.The fabrication method includes laser lithography of hybrid organic-inorganic materials with subsequent heat treatment leading to a variety of crystalline phases in 3D structures.In this work,it was examined a series of organometallic polymer precursors with different silicon(Si)and zirconium(Zr)molar ratios,ranging from 9:1 to 5:5,prepared via sol-gel method.All mixtures were examined for perspective to be used in 3D laser manufacturing by fabricating nano-and micro-feature sized structures.Their spatial downscaling and surface morphology were evaluated depending on chemical composition and crystallographic phase.The appearance of a crystalline phase was proven using single-crystal X-ray diffraction analysis,which revealed a lower crystallization temperature for microstructures compared to bulk materials.Fabricated 3D objects retained a complex geometry without any distortion after heat treatment up to 1400℃.Under the proper conditions,a wide variety of crystalline phases as well as zircon(ZrSiO_(4)-a highly stable material)can be observed.In addition,the highest new record of achieved resolution below 60 nm has been reached.The proposed preparation protocol can be used to manufacture micro/nano-devices with high precision and resistance to high temperature and aggressive environment.展开更多
Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific,technological and industrial potential.In ultrafast laser manufacturing,optica...Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific,technological and industrial potential.In ultrafast laser manufacturing,optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice ions.Control of photoionization and thermal processes with the highest precision,inducing local photomodification in sub-100-nm-sized regions has been achieved.State-of-the-art ultrashort laser processing techniques exploit high 0.1–1μm spatial resolution and almost unrestricted three-dimensional structuring capability.Adjustable pulse duration,spatiotemporal chirp,phase front tilt and polarization allow control of photomodification via uniquely wide parameter space.Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second,leading to a fast lab-to-fab transfer.The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput.Emerging biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.展开更多
基金The US AMRDEC grant No.W911NF-16-2-0069“Enhanced Absorption in Stopped-Light Photonic Nanostructures:Applications to Efficient Sensing”EU LASERLAB-EUROPE(grant agreement No.871124Horizon 2020 research and innovation programme)projects are acknowleged for the financial support.D.G.acknowledges the financial support from the European Social Fund(project No 09.3.3-LMT-K712-17-0016)under grant agreement with the Research Council of Lithuania(LMTLT).
文摘The current study is directed to the rapidly developing field of inorganic material 3D object production at nano-/micro scale.The fabrication method includes laser lithography of hybrid organic-inorganic materials with subsequent heat treatment leading to a variety of crystalline phases in 3D structures.In this work,it was examined a series of organometallic polymer precursors with different silicon(Si)and zirconium(Zr)molar ratios,ranging from 9:1 to 5:5,prepared via sol-gel method.All mixtures were examined for perspective to be used in 3D laser manufacturing by fabricating nano-and micro-feature sized structures.Their spatial downscaling and surface morphology were evaluated depending on chemical composition and crystallographic phase.The appearance of a crystalline phase was proven using single-crystal X-ray diffraction analysis,which revealed a lower crystallization temperature for microstructures compared to bulk materials.Fabricated 3D objects retained a complex geometry without any distortion after heat treatment up to 1400℃.Under the proper conditions,a wide variety of crystalline phases as well as zircon(ZrSiO_(4)-a highly stable material)can be observed.In addition,the highest new record of achieved resolution below 60 nm has been reached.The proposed preparation protocol can be used to manufacture micro/nano-devices with high precision and resistance to high temperature and aggressive environment.
基金Project(S-MIP-20-17) supported by the Research Council of LithuaniaProject(871124) supported by the EU Horizon 2020, Research and Innovation program LASERLAB-EUROPE JRA。
文摘本文研究了有机-无机混合预聚物SZ2080^(TM)在不借助任何光引发剂的情况下,使用~100 fs振荡器在517 nm波长和76 MHz重复频率下的飞秒激光直写(一种精密3D打印技术,也称为双光子聚合光刻技术)。实验证明了该技术的可行性,并成功地生产出了三维柴堆形纳米结构、微支架、自由形式的微型物体“Benchy”和微立方体。本文创新点为:非放大激光系统仅提供40~500 p J的单个脉冲就能够在横截面数百纳米内诱导局域交联反应。证明了放大激光器的高脉冲能量和低重复率不是构造非光敏化聚合物的必需条件。本文对于理解激光驱动的纳米三维增材制造具有重要意义,拓宽了不使用光引发剂条件下的应用领域,如微光学、纳米光子学和生物医学。
基金support by a project‘ReSoft’(SEN-13/2015)from the Research Council of Lithuaniasupport by JSPS Kakenhi Grant No.15K04637+1 种基金support via ARC Discovery DP120102980Gintas Šlekys for the partnership project with Altechna Ltd on industrial fs-laser fabrication.
文摘Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific,technological and industrial potential.In ultrafast laser manufacturing,optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice ions.Control of photoionization and thermal processes with the highest precision,inducing local photomodification in sub-100-nm-sized regions has been achieved.State-of-the-art ultrashort laser processing techniques exploit high 0.1–1μm spatial resolution and almost unrestricted three-dimensional structuring capability.Adjustable pulse duration,spatiotemporal chirp,phase front tilt and polarization allow control of photomodification via uniquely wide parameter space.Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second,leading to a fast lab-to-fab transfer.The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput.Emerging biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.
