Physical Principles of Optimization of the Static Regime of a Cantilever-Type Power-effect Sensor with a Constant Rectangular Cross Section

In this paper an analysis of the physical principles of two-criterion optimization Pareto static mode of operation of power sensors cantilever type of rectangular type with a stable cross-section.The proposed criterion based on the Cauchy number is one of the characteristic numbers of the proportional miniaturization of microsystem technology.It is established that,for a rectangular cantilever with a stable cross-section,the value of the Cauchy does not depend on the width of the microconsole and the material from which it is made.