A line-shaped beam is useful for increasing the processing speed in laser grooving and scribing.In laser grooving,depth control of the processed structure is important for performing precise processing.In this paper,i...A line-shaped beam is useful for increasing the processing speed in laser grooving and scribing.In laser grooving,depth control of the processed structure is important for performing precise processing.In this paper,in-process monitoring of the depth of a structure formed by femtosecond laser processing with a line-shaped beam using swept-source optical coherence tomography(SS-OCT)was demonstrated.In the evaluation of the SS-OCT system,the depth resolution,measurement accuracy,and axial measurable range were 15.8μm,±2.5μm and 5.3 mm,respectively.In laser grooving,the structural shape and the distribution of deposited debris were successfully monitored.The measured depth agreed well with the depth obtained using a laser confocal microscope.The proposed method will be effective for precise laser processing with feedback control of the laser parameters based on in-process monitoring of the processed structure.展开更多
基金This work was supported by JSPS KAKENHI Grant Number JP18K14142was performed for the Council for Science,Technology and Innovation(CSTI),Cross-ministerial Strategic Innovation Promotion Program(SIP),“Photonics and Quantum Technology for Society 5.0”(Funding agency:QST).
文摘A line-shaped beam is useful for increasing the processing speed in laser grooving and scribing.In laser grooving,depth control of the processed structure is important for performing precise processing.In this paper,in-process monitoring of the depth of a structure formed by femtosecond laser processing with a line-shaped beam using swept-source optical coherence tomography(SS-OCT)was demonstrated.In the evaluation of the SS-OCT system,the depth resolution,measurement accuracy,and axial measurable range were 15.8μm,±2.5μm and 5.3 mm,respectively.In laser grooving,the structural shape and the distribution of deposited debris were successfully monitored.The measured depth agreed well with the depth obtained using a laser confocal microscope.The proposed method will be effective for precise laser processing with feedback control of the laser parameters based on in-process monitoring of the processed structure.
