We demonstrate the ability of a combined scanning electron microscope and cathodoluminescence （CL） spectral mapping system to provide important spatially resolved information. The degree of inhomogeneity in spectral...We demonstrate the ability of a combined scanning electron microscope and cathodoluminescence （CL） spectral mapping system to provide important spatially resolved information. The degree of inhomogeneity in spectral output across a multi-quantum well sample is measured using the SEM-CL system as well as measuring the efficiency roll-off with increasing carrier concentration. The effects of low energy electron beam modification on the InGaN/GaN multi quantum wells have also been characterized.展开更多
文摘We demonstrate the ability of a combined scanning electron microscope and cathodoluminescence （CL） spectral mapping system to provide important spatially resolved information. The degree of inhomogeneity in spectral output across a multi-quantum well sample is measured using the SEM-CL system as well as measuring the efficiency roll-off with increasing carrier concentration. The effects of low energy electron beam modification on the InGaN/GaN multi quantum wells have also been characterized.
