The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes.This gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the per...The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes.This gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the performance.For the sensor,a high-quality factor and long decaying time constant are the most important characteristics required to achieve high performance.We report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s,which is a record for MEMS silicon disk resonator gyroscopes,to the best of our knowledge.To improve the quality factor of the DRG,the quality factor improvement mechanism is first analyzed,and based on this mechanism two stiffness-mass decoupled methods,i.e.,spoke length distribution optimization and lumped mass configuration design,are proposed and demonstrated.A disk resonator gyroscope prototype is fabricated based on these design strategies,and the sensor itself shows an angle random walk as low as 0.001°/√h,demonstrating true potential to achieve navigation-grade performance.The gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation,revealing that the performance of the gyroscope is severely limited by the readout electronics,which should be further improved.We expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial,transportation,aerospace,and automotive applications.展开更多
Mesoporous tin oxide（SnO_2/ with a high surface area of 147.5 m^2/g has been successfully synthesized via self-assembly process, combining the driven forces of water-evaporation and molecular interactions. Scanning e...Mesoporous tin oxide（SnO_2/ with a high surface area of 147.5 m^2/g has been successfully synthesized via self-assembly process, combining the driven forces of water-evaporation and molecular interactions. Scanning electron microscope, X-ray diffraction, transmission electron micrograph, Fourier transform infrared and BrunauerEmmett-Teller were employed to analyze the morphology and crystal structure of the as-synthesized mesoporous materials. As a gas sensor, mesoporous SnO_2 shows impressive performances towards NOx gas with high selectivity and stability as well as ultra high sensitivity about 94.3 to 10 ppm NO_x gas at 300 ℃. The best response time of the sample S-500 is about 3.4 s to 10 ppm NO_x at 450℃.展开更多
基金This work was supported by the National Natural Science Foundation of China under Grant 51575521the 2017 Huxiang Provincial Scholar Program.
文摘The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes.This gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the performance.For the sensor,a high-quality factor and long decaying time constant are the most important characteristics required to achieve high performance.We report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s,which is a record for MEMS silicon disk resonator gyroscopes,to the best of our knowledge.To improve the quality factor of the DRG,the quality factor improvement mechanism is first analyzed,and based on this mechanism two stiffness-mass decoupled methods,i.e.,spoke length distribution optimization and lumped mass configuration design,are proposed and demonstrated.A disk resonator gyroscope prototype is fabricated based on these design strategies,and the sensor itself shows an angle random walk as low as 0.001°/√h,demonstrating true potential to achieve navigation-grade performance.The gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation,revealing that the performance of the gyroscope is severely limited by the readout electronics,which should be further improved.We expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial,transportation,aerospace,and automotive applications.
基金Project supported by the Hunan Provincial Innovation Foundation for Postgraduates(No.CX2014B133)
文摘Mesoporous tin oxide（SnO_2/ with a high surface area of 147.5 m^2/g has been successfully synthesized via self-assembly process, combining the driven forces of water-evaporation and molecular interactions. Scanning electron microscope, X-ray diffraction, transmission electron micrograph, Fourier transform infrared and BrunauerEmmett-Teller were employed to analyze the morphology and crystal structure of the as-synthesized mesoporous materials. As a gas sensor, mesoporous SnO_2 shows impressive performances towards NOx gas with high selectivity and stability as well as ultra high sensitivity about 94.3 to 10 ppm NO_x gas at 300 ℃. The best response time of the sample S-500 is about 3.4 s to 10 ppm NO_x at 450℃.
