The objective of this study is to experimentally visualize traveling vortices in the boundary layer on a rotating disk under orbital motion. The orbital radius is half of the disk’s diameter (200 mm) and the maximum ...The objective of this study is to experimentally visualize traveling vortices in the boundary layer on a rotating disk under orbital motion. The orbital radius is half of the disk’s diameter (200 mm) and the maximum speed of orbital motion is 500 revolutions per minute. The Reynolds number in the pure-rotation case is 2.77 × 105. The characteristics of two types of traveling vortices are visualized by a smoke-wire method. The first type is transition vortices. In the pure-rotation case, they arise at circumferentially equal intervals, and are not traveling but stationary relative to the rotational disk. The result of visualization of this type shows that the intervals between transient vortices change in a circumferential direction, or in an orbital radial direction, on the rotating disk under orbital motion. The second type is new arc-shaped vortices that correspond to low-frequency disturbances. As orbital speed increases, the radial traveling velocities of the low-frequency disturbances increase and the intervals between low-frequency disturbances decrease.展开更多
Numerical results of three-dimensional separated flow and heat transfer in an enlarged rectangular channel are presented in this paper. The expansion ratio and aspect ratio of the channel are 2.0 and 8.0, respectively...Numerical results of three-dimensional separated flow and heat transfer in an enlarged rectangular channel are presented in this paper. The expansion ratio and aspect ratio of the channel are 2.0 and 8.0, respectively. Reynolds number of the flow is 200 and it is over the critical Reynolds number. Over the value, the flow in the symmetric channel becomes to deflect to one side of the walls. Transient response characteristics of the flow and heat transfer in the channel with the fully developed flow imposed one cycle of a pulsating fluctuation at the inlet are investigated. Vortex structure generated in the channel is visualized with a helicity isosurface. In the case of the fluctuation of Strouhal number 0.05, small streamwise vortices appear near the side walls and slightly upstream of the reattachment region of the short separation bubble. The vortices elongate and shed some vortices. These vortices attract some pairs of the streamwise vortices near the reattachment region quickly and they drift downstream along the side walls. They are inclined from the walls and are decaying gradually. It is clarified that high Nusselt number area appears and shifts downstream in accordance with the root of the vortices.展开更多
The purpose of this study is to investigate experimentally the effects of orbital motion on the velocity field of boundary layer flow over a rotating disk. The characteristics of velocity field at a fixed orbital angu...The purpose of this study is to investigate experimentally the effects of orbital motion on the velocity field of boundary layer flow over a rotating disk. The characteristics of velocity field at a fixed orbital angular section measured by a hot-wire anemometer show that the structure of the 3-dimensional boundary layer flow is deformed elliptically and displaced in a certain direction that is not in the orbital radial direction, but the direction of deformation depends on the combination of orbital and rotational directions. For coincide orbital and rotational directions, there are regions where the intensity of low-frequency disturbances increases rapidly in a certain central region (laminar region under pure rotation). The transient vortices, which form streaks on the coating film, are considered to be destroyed by low-frequency disturbances. However, for opposite orbital and rotational directions, the low-frequency disturbances are not observed in any section. As the adding orbital speed increases, the intensity of velocity fluctuations in the turbulence region becomes larger in the expected except in a certain region. This location of the region also depends on the direction of deformation or the combination of orbital and rotational directions.展开更多
The objective of this study is to experimentally examine the effects of orbital motion on the boundary layer flow on a spinning disk. The boundary layer flow on the disk is visualized by the oil flow method, and veloc...The objective of this study is to experimentally examine the effects of orbital motion on the boundary layer flow on a spinning disk. The boundary layer flow on the disk is visualized by the oil flow method, and velocity in the boundary layer is measured by the hot-wire method. For the oil flow pattern in the case of spinning motion only, streaks are clearly observed on the disk as transient vortices, but by adding orbital motion to the spinning motion, we find that streaks are not observed in a certain range of orbital conditions. With increasing orbital motion speed, the laminar re- gion becomes narrower and transition is promoted from the inward region of the disk, regardless of the direction of ro- tation. Also, with the addition of orbital motion, the velocity profile in the boundary layer becomes more asymmetric with respect to the spin axis of the disk. Furthermore, stationary vortices do not appear on the disk when the orbital speed is beyond a certain critical value. Therefore, the lack of streaks in the oil film pattern when orbital motion is added is due to the spatiotemporal unsteadiness of the flow field on the disk.展开更多
Effects of disk edge profile on scattering characteristics of liquid droplets splashed from a rotating disk edge are experimentally investigated. In the present research, aluminum disks are utilized and purified water...Effects of disk edge profile on scattering characteristics of liquid droplets splashed from a rotating disk edge are experimentally investigated. In the present research, aluminum disks are utilized and purified water is employed for liquid. Scattering phenomena of the droplets are captured by the high-speed digital camera. Distribution of the droplet diameter is evaluated from these images and distributions of horizontal flying velocity component and angle of the droplets are measured by human visual observation of images. Liquid filaments are stretched outward from the stagnant liquid layer on lateral surface of disk edge by centrifugal force. Two main peaks appear in the distribution of the scattered droplet diameter and they are originated from large terminal droplets and small droplets generated from filamentwise breakup. Most of the scattered droplets fly slightly inside of the tangential direction of the disk edge. The water droplets splashed from the disk scatters with regularity compared with ethanol droplets.展开更多
The purpose of this study is to establish the high-accurate prediction method of particle separation in a cyclone separator. Numerical simulation of the swirling flows in a cyclone separator is performed by using a la...The purpose of this study is to establish the high-accurate prediction method of particle separation in a cyclone separator. Numerical simulation of the swirling flows in a cyclone separator is performed by using a large eddy simulation (LES) based on a Smagorinsky model. The validity of the simulation and the complicated flow characteristics are discussed by comparison with experimental results. Moreover, particle motions are treated by a Lagrangian method and are calculated with a one-way method. A performance for particle separation is predicted from the results of the particle tracing. As results of our investigation, the influences of the inserted height of the outlet pipe on the performance for particle separation of cyclone separator are shown.展开更多
It is well known that the drag-reducing effect is obtained in a surfactant solution flow in a straight pipe. We investigate about a viscoelastic fluid flow such as a surfactant solution flow in a square-section 90...It is well known that the drag-reducing effect is obtained in a surfactant solution flow in a straight pipe. We investigate about a viscoelastic fluid flow such as a surfactant solution flow in a square-section 90° bend. In the experimental study, drag-reducing effect and velocity field in a surfactant solution flow are investigated by measurements of wall pressure loss and LDV measurements. For the numerical method, LES with FENE-P model is used in the viscoelastic fluid flow in the bend. The flow characteristics of viscoelastic fluid are discussed compared with that of a Newtonian fluid.展开更多
The major causes of the sound pressure level (SPL) variation due to the changes of the inclined angle of a circular cylinder and the aspect ratio (ratio of distance between endplates to cylinder diameter) were investi...The major causes of the sound pressure level (SPL) variation due to the changes of the inclined angle of a circular cylinder and the aspect ratio (ratio of distance between endplates to cylinder diameter) were investigated. The velocity fluctuation of the wake and the surface pressure fluctuation of the cylinder were measured in a low noise wind tunnel to find the correlation length, coherent output power and Strouhal number. The results show that the changes of these values qualitatively correspond with the change of SPL. Flow visualization tests are performed to clarify the variation of wake in relation with inclined angle and aspect ratio. It is found that the spanwise structure of Karman’s vortex street is broken down by the upward flows generated around the bottom endplate, and the degree of the interference between the upward flow and Karman’s vortex street is smaller when the aspect ratio is larger.展开更多
In our previous study, the effects of the interval between the cylinder and the airfoil on the aerodynamic sound were investigated and compared with the cases of single circular and single airfoil. In this study, the ...In our previous study, the effects of the interval between the cylinder and the airfoil on the aerodynamic sound were investigated and compared with the cases of single circular and single airfoil. In this study, the effects of the attack angle of the airfoil located downstream on the characteristics of aerodynamic sound and the wake structure are investigated at a given interval between the cylinder and the airfoil. It is found that the sound pressure level of DFN and the peak frequency decrease with increasing attack angle of airfoil because of the diffusive wake structure due to the increased back pressure of circular cylinder, which is caused by the blocking effect of airfoil. It is shown that the sound sources are corresponded to the attack points of shedding vortex form the upstream circular cylinder to the downstream airfoil. We conclude that the pressure fluctuation at the airfoil surface effects on the sound pressure level, from the flow visualizations and the exploration test of sound source.展开更多
Effects of non-Newtonian viscosity for surfactant solution on the vortex characteristics and drag-reducing rate in a swirling pipe flow are investigated by pressure drop measurements, velocity profile measurements and...Effects of non-Newtonian viscosity for surfactant solution on the vortex characteristics and drag-reducing rate in a swirling pipe flow are investigated by pressure drop measurements, velocity profile measurements and viscosity measurements. Non-Newtonian viscosity is represented by power-law model (t= kD^π). Surfactant solution used has shear-thinning viscosity with n 〈 1.0. The swirling flow in this study has decay of swirl and vortex-type change from Rankin's combined vortex to forced vortex. It is shown that the effect of shear-thinning viscosity on the decay of swirl intensity is different by vortex category and the critical swirl number with the vortex-type change depends on shear-thinning viscosity.展开更多
Numerical results of three-dimensional separated flow and heat transfer in an enlarged rectangular channel are presented in this paper.The expansion ratio and aspect ratio of the channel are 2.0 and 16.0,respectively....Numerical results of three-dimensional separated flow and heat transfer in an enlarged rectangular channel are presented in this paper.The expansion ratio and aspect ratio of the channel are 2.0 and 16.0,respectively.Reynolds number of the flow is 200 and it is over the critical Reynolds number.Over the critical Reynolds number,the flow in the symmetric channel becomes asymmetric and deflects to one side of the walls.Effects of the pulsating fluctuation at the inlet upon the flow in the channel are investigated.It is clarified that the inlet flow with a pulsating fluctuation of Strouhal number 0.05 and 0.10 strongly affects on the flow in the channel,and heat transfer on the walls is enhanced,especially on the wall surface covered with long separation bubble.On the other hand,the pulsation of St=0.0125 oscillates the shear layer more weakly than that of St=0.05,0.10 and the enhancement of heat transfer is smaller,though some vortices are shed from the vicinity of the side wall near the reattachment region.The oscillation of the main flow calms down gradually as the Strouhal number of the pulsation increases over 0.10.The influence of pulsation of St=0.20 on the flow is restricted in the near downstream of the step,and heat transfer on the walls is almost similar to that of the steady flow in the channel.展开更多
In order to develop the practical approximation models suitable to flow fields at low Mach number with large temperature difference, the influence of difference in approximation models on numerical solutions was inves...In order to develop the practical approximation models suitable to flow fields at low Mach number with large temperature difference, the influence of difference in approximation models on numerical solutions was investigated by solving the natural convection in the 3-D enclosures with vertical sidewalls differentially heated and the heated bottom wall using 3 approximation models, that is Boussinesq approximation, low Mach Number approximation and approximation model proposed by Mlaouah. As results of the simulation, the effects of the differences in the three approximation models on the numerical solutions become clear.展开更多
Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor instruments become more sophisticated. Spin coating is...Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor instruments become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped photoresist scarers outward and reattaches on the film surface. A catch cup is set up outside the wafer in spin coating, and scattered photoresist mist is removed from the wafer edge by the exhaust flow generated at the gap between the wafer edge and the catch cup. In the dry process of a spin coating, it is a serious concern that the film thickness increases near the wafer edge in the case of low rotating speed. The purpose of this study is to make clear the effect of the catch cup geometry on the 3D boundary layer flow over the wafer surface and the drying rate of liquid film.展开更多
The objective of this study is to experimentally examine the characteristics of transient vortices in the boundary layer on a disk undergoing both rotation and orbital motion. The velocity fluctuations on a rotating, ...The objective of this study is to experimentally examine the characteristics of transient vortices in the boundary layer on a disk undergoing both rotation and orbital motion. The velocity fluctuations on a rotating, orbiting disk (disk radius equal to orbital radius) are measured by the hot-wire method, and the effects of orbital motion on the transient vortices in the boundary layer are examined. When the ratio of the orbital speed to the speed of rotation is i-0.025, the interval of transient vortices depends on only the orbital radius, regardless of the directions of rota- tion and orbital motion. The rate of low-frequency disturbances increases as the orbital speed increases, and the vortices induced by these low-frequency disturbances travel over the disk and then develop in the region of in- creased velocity. Consequently, no vortices generated on a rotating disk under orbital motion are stationary rela- tive to the disk.展开更多
Recently,development of high technology has been required for the formation of uniform thin film in manufacturing processes of semiconductor as the precision instruments become more sophisticated.A method called spin ...Recently,development of high technology has been required for the formation of uniform thin film in manufacturing processes of semiconductor as the precision instruments become more sophisticated.A method called spin coating is often used for spreading photoresist on a wafer surface and drying photoresist film.In spin coating process,photoresist is uniformly spread on the wafer surface by centrifugal force caused by rotating wafer.However,it is a serious concern that streaky lines,which are caused by spiral vortices,appear on the wafer surface and prevent the formation of uniform film in the case of high rotating speed.On the other hand,in the case of low rotating speed,a small hump of the film is formed near the wafer edge.The main purpose of this study is to make clear the drying characteristics of the flowing liquid film on the rotating wafer.Temperature distribution of the flowing liquid film is captured by an infrared thermal video camera and radial gradient of the film temperature is introduced in order to evaluate the drying characteristic of the flowing film under steady state condition.Effects of the flow rate of the liquid film on the film temperature are investigated.The film temperature gradually decreases in the radial direction in all cases.At low rotating speed,the radial gradient of the film temperature is almost constant widely.On the other hand,at high rotating speed,the radial gradient of the film temperature takes a certain maximum value.It is found that the location of the gradient peak corresponds with the transition region of the air boundary layer,in which spiral vortices swirl,and shifts to the inner side of the disk with an increase of the liquid flow rate.展开更多
Scattering characteristics of liquid droplets spun off from a rotating disk edge are experimentally investigated. In the present research, aluminum disks are utilized and ethanol is employed for liquid. Scattering phe...Scattering characteristics of liquid droplets spun off from a rotating disk edge are experimentally investigated. In the present research, aluminum disks are utilized and ethanol is employed for liquid. Scattering phenomena of the droplets are captured by the high-speed digital camera. Frequency distribution of the droplet diameter is evaluated from these images and distributions of horizontal flying velocity and angle of the droplets were measured by PTV. Liquid filaments are stretched outward from the stagnant liquid layer by centrifugal force and skew complicatedly by aerodynamic force. Some peaks appear in the distribution of the scattered droplet diameter and they are origi- nated from large terminal droplets and small droplets generated from filamentwise breakup. Most of the scattered droplets fly slightly inside in the tangential direction of the disk edge. The droplets spun off from the thin disk scatter widely compared with that from the thick one.展开更多
Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor become more sophisticated. Spin coating is usually use...Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped resist scatters outward and reattaches to the film surface. So, the scattered resist is removed by the exhaust flow generated at the gap between the wafer edge and the catch cup. It is seriously concerned that the stripes called Ekman spiral vortices appears on the disk in the case of high rotating speed and the film thickness increases near the wafer edge in the case of low rotating speed, because it prevent the formation of uniform film. The purpose of this study is to make clear the generation mechanism of Ekman spiral vortices and the influence of exhaust flow on it Moreover the influence of the catch cup geometry on the wafer surface boundary layer flow is investigated.展开更多
文摘The objective of this study is to experimentally visualize traveling vortices in the boundary layer on a rotating disk under orbital motion. The orbital radius is half of the disk’s diameter (200 mm) and the maximum speed of orbital motion is 500 revolutions per minute. The Reynolds number in the pure-rotation case is 2.77 × 105. The characteristics of two types of traveling vortices are visualized by a smoke-wire method. The first type is transition vortices. In the pure-rotation case, they arise at circumferentially equal intervals, and are not traveling but stationary relative to the rotational disk. The result of visualization of this type shows that the intervals between transient vortices change in a circumferential direction, or in an orbital radial direction, on the rotating disk under orbital motion. The second type is new arc-shaped vortices that correspond to low-frequency disturbances. As orbital speed increases, the radial traveling velocities of the low-frequency disturbances increase and the intervals between low-frequency disturbances decrease.
文摘Numerical results of three-dimensional separated flow and heat transfer in an enlarged rectangular channel are presented in this paper. The expansion ratio and aspect ratio of the channel are 2.0 and 8.0, respectively. Reynolds number of the flow is 200 and it is over the critical Reynolds number. Over the value, the flow in the symmetric channel becomes to deflect to one side of the walls. Transient response characteristics of the flow and heat transfer in the channel with the fully developed flow imposed one cycle of a pulsating fluctuation at the inlet are investigated. Vortex structure generated in the channel is visualized with a helicity isosurface. In the case of the fluctuation of Strouhal number 0.05, small streamwise vortices appear near the side walls and slightly upstream of the reattachment region of the short separation bubble. The vortices elongate and shed some vortices. These vortices attract some pairs of the streamwise vortices near the reattachment region quickly and they drift downstream along the side walls. They are inclined from the walls and are decaying gradually. It is clarified that high Nusselt number area appears and shifts downstream in accordance with the root of the vortices.
文摘The purpose of this study is to investigate experimentally the effects of orbital motion on the velocity field of boundary layer flow over a rotating disk. The characteristics of velocity field at a fixed orbital angular section measured by a hot-wire anemometer show that the structure of the 3-dimensional boundary layer flow is deformed elliptically and displaced in a certain direction that is not in the orbital radial direction, but the direction of deformation depends on the combination of orbital and rotational directions. For coincide orbital and rotational directions, there are regions where the intensity of low-frequency disturbances increases rapidly in a certain central region (laminar region under pure rotation). The transient vortices, which form streaks on the coating film, are considered to be destroyed by low-frequency disturbances. However, for opposite orbital and rotational directions, the low-frequency disturbances are not observed in any section. As the adding orbital speed increases, the intensity of velocity fluctuations in the turbulence region becomes larger in the expected except in a certain region. This location of the region also depends on the direction of deformation or the combination of orbital and rotational directions.
文摘The objective of this study is to experimentally examine the effects of orbital motion on the boundary layer flow on a spinning disk. The boundary layer flow on the disk is visualized by the oil flow method, and velocity in the boundary layer is measured by the hot-wire method. For the oil flow pattern in the case of spinning motion only, streaks are clearly observed on the disk as transient vortices, but by adding orbital motion to the spinning motion, we find that streaks are not observed in a certain range of orbital conditions. With increasing orbital motion speed, the laminar re- gion becomes narrower and transition is promoted from the inward region of the disk, regardless of the direction of ro- tation. Also, with the addition of orbital motion, the velocity profile in the boundary layer becomes more asymmetric with respect to the spin axis of the disk. Furthermore, stationary vortices do not appear on the disk when the orbital speed is beyond a certain critical value. Therefore, the lack of streaks in the oil film pattern when orbital motion is added is due to the spatiotemporal unsteadiness of the flow field on the disk.
文摘Effects of disk edge profile on scattering characteristics of liquid droplets splashed from a rotating disk edge are experimentally investigated. In the present research, aluminum disks are utilized and purified water is employed for liquid. Scattering phenomena of the droplets are captured by the high-speed digital camera. Distribution of the droplet diameter is evaluated from these images and distributions of horizontal flying velocity component and angle of the droplets are measured by human visual observation of images. Liquid filaments are stretched outward from the stagnant liquid layer on lateral surface of disk edge by centrifugal force. Two main peaks appear in the distribution of the scattered droplet diameter and they are originated from large terminal droplets and small droplets generated from filamentwise breakup. Most of the scattered droplets fly slightly inside of the tangential direction of the disk edge. The water droplets splashed from the disk scatters with regularity compared with ethanol droplets.
文摘The purpose of this study is to establish the high-accurate prediction method of particle separation in a cyclone separator. Numerical simulation of the swirling flows in a cyclone separator is performed by using a large eddy simulation (LES) based on a Smagorinsky model. The validity of the simulation and the complicated flow characteristics are discussed by comparison with experimental results. Moreover, particle motions are treated by a Lagrangian method and are calculated with a one-way method. A performance for particle separation is predicted from the results of the particle tracing. As results of our investigation, the influences of the inserted height of the outlet pipe on the performance for particle separation of cyclone separator are shown.
文摘It is well known that the drag-reducing effect is obtained in a surfactant solution flow in a straight pipe. We investigate about a viscoelastic fluid flow such as a surfactant solution flow in a square-section 90° bend. In the experimental study, drag-reducing effect and velocity field in a surfactant solution flow are investigated by measurements of wall pressure loss and LDV measurements. For the numerical method, LES with FENE-P model is used in the viscoelastic fluid flow in the bend. The flow characteristics of viscoelastic fluid are discussed compared with that of a Newtonian fluid.
文摘The major causes of the sound pressure level (SPL) variation due to the changes of the inclined angle of a circular cylinder and the aspect ratio (ratio of distance between endplates to cylinder diameter) were investigated. The velocity fluctuation of the wake and the surface pressure fluctuation of the cylinder were measured in a low noise wind tunnel to find the correlation length, coherent output power and Strouhal number. The results show that the changes of these values qualitatively correspond with the change of SPL. Flow visualization tests are performed to clarify the variation of wake in relation with inclined angle and aspect ratio. It is found that the spanwise structure of Karman’s vortex street is broken down by the upward flows generated around the bottom endplate, and the degree of the interference between the upward flow and Karman’s vortex street is smaller when the aspect ratio is larger.
文摘In our previous study, the effects of the interval between the cylinder and the airfoil on the aerodynamic sound were investigated and compared with the cases of single circular and single airfoil. In this study, the effects of the attack angle of the airfoil located downstream on the characteristics of aerodynamic sound and the wake structure are investigated at a given interval between the cylinder and the airfoil. It is found that the sound pressure level of DFN and the peak frequency decrease with increasing attack angle of airfoil because of the diffusive wake structure due to the increased back pressure of circular cylinder, which is caused by the blocking effect of airfoil. It is shown that the sound sources are corresponded to the attack points of shedding vortex form the upstream circular cylinder to the downstream airfoil. We conclude that the pressure fluctuation at the airfoil surface effects on the sound pressure level, from the flow visualizations and the exploration test of sound source.
文摘Effects of non-Newtonian viscosity for surfactant solution on the vortex characteristics and drag-reducing rate in a swirling pipe flow are investigated by pressure drop measurements, velocity profile measurements and viscosity measurements. Non-Newtonian viscosity is represented by power-law model (t= kD^π). Surfactant solution used has shear-thinning viscosity with n 〈 1.0. The swirling flow in this study has decay of swirl and vortex-type change from Rankin's combined vortex to forced vortex. It is shown that the effect of shear-thinning viscosity on the decay of swirl intensity is different by vortex category and the critical swirl number with the vortex-type change depends on shear-thinning viscosity.
基金These results were partly obtained with a supercomputer SX-9 of Cyberscience Center,Tohoku University
文摘Numerical results of three-dimensional separated flow and heat transfer in an enlarged rectangular channel are presented in this paper.The expansion ratio and aspect ratio of the channel are 2.0 and 16.0,respectively.Reynolds number of the flow is 200 and it is over the critical Reynolds number.Over the critical Reynolds number,the flow in the symmetric channel becomes asymmetric and deflects to one side of the walls.Effects of the pulsating fluctuation at the inlet upon the flow in the channel are investigated.It is clarified that the inlet flow with a pulsating fluctuation of Strouhal number 0.05 and 0.10 strongly affects on the flow in the channel,and heat transfer on the walls is enhanced,especially on the wall surface covered with long separation bubble.On the other hand,the pulsation of St=0.0125 oscillates the shear layer more weakly than that of St=0.05,0.10 and the enhancement of heat transfer is smaller,though some vortices are shed from the vicinity of the side wall near the reattachment region.The oscillation of the main flow calms down gradually as the Strouhal number of the pulsation increases over 0.10.The influence of pulsation of St=0.20 on the flow is restricted in the near downstream of the step,and heat transfer on the walls is almost similar to that of the steady flow in the channel.
文摘In order to develop the practical approximation models suitable to flow fields at low Mach number with large temperature difference, the influence of difference in approximation models on numerical solutions was investigated by solving the natural convection in the 3-D enclosures with vertical sidewalls differentially heated and the heated bottom wall using 3 approximation models, that is Boussinesq approximation, low Mach Number approximation and approximation model proposed by Mlaouah. As results of the simulation, the effects of the differences in the three approximation models on the numerical solutions become clear.
基金the 21~(st)Century COE program of Pulse Power Science of Kumamoto University
文摘Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor instruments become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped photoresist scarers outward and reattaches on the film surface. A catch cup is set up outside the wafer in spin coating, and scattered photoresist mist is removed from the wafer edge by the exhaust flow generated at the gap between the wafer edge and the catch cup. In the dry process of a spin coating, it is a serious concern that the film thickness increases near the wafer edge in the case of low rotating speed. The purpose of this study is to make clear the effect of the catch cup geometry on the 3D boundary layer flow over the wafer surface and the drying rate of liquid film.
基金supported by the Harada Memorial Foundation and a Grant-in-Aid for Scientific Research (No. 24560202) from the Japan Society for the Promotion of Science
文摘The objective of this study is to experimentally examine the characteristics of transient vortices in the boundary layer on a disk undergoing both rotation and orbital motion. The velocity fluctuations on a rotating, orbiting disk (disk radius equal to orbital radius) are measured by the hot-wire method, and the effects of orbital motion on the transient vortices in the boundary layer are examined. When the ratio of the orbital speed to the speed of rotation is i-0.025, the interval of transient vortices depends on only the orbital radius, regardless of the directions of rota- tion and orbital motion. The rate of low-frequency disturbances increases as the orbital speed increases, and the vortices induced by these low-frequency disturbances travel over the disk and then develop in the region of in- creased velocity. Consequently, no vortices generated on a rotating disk under orbital motion are stationary rela- tive to the disk.
文摘Recently,development of high technology has been required for the formation of uniform thin film in manufacturing processes of semiconductor as the precision instruments become more sophisticated.A method called spin coating is often used for spreading photoresist on a wafer surface and drying photoresist film.In spin coating process,photoresist is uniformly spread on the wafer surface by centrifugal force caused by rotating wafer.However,it is a serious concern that streaky lines,which are caused by spiral vortices,appear on the wafer surface and prevent the formation of uniform film in the case of high rotating speed.On the other hand,in the case of low rotating speed,a small hump of the film is formed near the wafer edge.The main purpose of this study is to make clear the drying characteristics of the flowing liquid film on the rotating wafer.Temperature distribution of the flowing liquid film is captured by an infrared thermal video camera and radial gradient of the film temperature is introduced in order to evaluate the drying characteristic of the flowing film under steady state condition.Effects of the flow rate of the liquid film on the film temperature are investigated.The film temperature gradually decreases in the radial direction in all cases.At low rotating speed,the radial gradient of the film temperature is almost constant widely.On the other hand,at high rotating speed,the radial gradient of the film temperature takes a certain maximum value.It is found that the location of the gradient peak corresponds with the transition region of the air boundary layer,in which spiral vortices swirl,and shifts to the inner side of the disk with an increase of the liquid flow rate.
文摘Scattering characteristics of liquid droplets spun off from a rotating disk edge are experimentally investigated. In the present research, aluminum disks are utilized and ethanol is employed for liquid. Scattering phenomena of the droplets are captured by the high-speed digital camera. Frequency distribution of the droplet diameter is evaluated from these images and distributions of horizontal flying velocity and angle of the droplets were measured by PTV. Liquid filaments are stretched outward from the stagnant liquid layer by centrifugal force and skew complicatedly by aerodynamic force. Some peaks appear in the distribution of the scattered droplet diameter and they are origi- nated from large terminal droplets and small droplets generated from filamentwise breakup. Most of the scattered droplets fly slightly inside in the tangential direction of the disk edge. The droplets spun off from the thin disk scatter widely compared with that from the thick one.
文摘Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped resist scatters outward and reattaches to the film surface. So, the scattered resist is removed by the exhaust flow generated at the gap between the wafer edge and the catch cup. It is seriously concerned that the stripes called Ekman spiral vortices appears on the disk in the case of high rotating speed and the film thickness increases near the wafer edge in the case of low rotating speed, because it prevent the formation of uniform film. The purpose of this study is to make clear the generation mechanism of Ekman spiral vortices and the influence of exhaust flow on it Moreover the influence of the catch cup geometry on the wafer surface boundary layer flow is investigated.