A new detection system in scanning electron microscope,which filters in energy and detects the backscattered electrons close to the microscope axis,is described.This technique ameliorates the dependence of the back.sc...A new detection system in scanning electron microscope,which filters in energy and detects the backscattered electrons close to the microscope axis,is described.This technique ameliorates the dependence of the back.scat tering coefficient on atomic number,and suppresses effectively the relief contrast at the same time.Therefore this new method is very suitable to the composition analysis.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No.10045001.
文摘A new detection system in scanning electron microscope,which filters in energy and detects the backscattered electrons close to the microscope axis,is described.This technique ameliorates the dependence of the back.scat tering coefficient on atomic number,and suppresses effectively the relief contrast at the same time.Therefore this new method is very suitable to the composition analysis.
