This study proposes a novel design and micromachining process for a dual-cantilever accelerometer.Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping,thus ...This study proposes a novel design and micromachining process for a dual-cantilever accelerometer.Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping,thus effectively optimizing the response frequency bandwidth.Owing to the high stress concentration on the dual-cantilever integrated with a fully sensitive piezoresistive Wheatstone bridge,a high sensitivity to acceleration is achieved.In addition,the dual-cantilever accelerometer is fabricated using a specifically developed low-cost and high-yield(111)-silicon single-side bulk-micromachining process.The test results show that the proposed dualcantilever accelerometer exhibits a sensitivity of 0.086—0.088 mV/g/3.3 V and a nonlinearity of±(0.09%—0.23%)FS(full-scale).Based on dynamic characterization,an adequate frequency bandwidth of 2.64 kHz is verified.Furthermore,a resonant frequency of 4.388 kHz is measured,and a low quality factor(Q)of 7.62 is obtained,which agrees well with the design for air-damping modulation.The achieved high performance renders the proposed dual-cantilever accelerometer promising in applications such as automotive and consumer electronics.展开更多
The evaluation of reliability for structural system is important in engineering practices.In this paper,by combining the design point method,JC method,interval analysis theory,and increment load method,we propose a ne...The evaluation of reliability for structural system is important in engineering practices.In this paper,by combining the design point method,JC method,interval analysis theory,and increment load method,we propose a new interval design point method for the reliability of structural systems in which the distribution parameters of random variables are described as interval variables.The proposed method may provide exact probabilistic interval reliability of structures whose random variables can have either a normal or abnormal distribution form.At last,we show the feasibility of the proposed approach through a typical example.展开更多
基金National Key R&D Program of China(Nos.2016YFA0200800 and 2016YFA0200803)National Natural Science Foundation of China(Nos.61674160 and 61834007)。
文摘This study proposes a novel design and micromachining process for a dual-cantilever accelerometer.Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping,thus effectively optimizing the response frequency bandwidth.Owing to the high stress concentration on the dual-cantilever integrated with a fully sensitive piezoresistive Wheatstone bridge,a high sensitivity to acceleration is achieved.In addition,the dual-cantilever accelerometer is fabricated using a specifically developed low-cost and high-yield(111)-silicon single-side bulk-micromachining process.The test results show that the proposed dualcantilever accelerometer exhibits a sensitivity of 0.086—0.088 mV/g/3.3 V and a nonlinearity of±(0.09%—0.23%)FS(full-scale).Based on dynamic characterization,an adequate frequency bandwidth of 2.64 kHz is verified.Furthermore,a resonant frequency of 4.388 kHz is measured,and a low quality factor(Q)of 7.62 is obtained,which agrees well with the design for air-damping modulation.The achieved high performance renders the proposed dual-cantilever accelerometer promising in applications such as automotive and consumer electronics.
基金supported by the Postdoctoral Science Foundation of China(Grant No.2013M531239)
文摘The evaluation of reliability for structural system is important in engineering practices.In this paper,by combining the design point method,JC method,interval analysis theory,and increment load method,we propose a new interval design point method for the reliability of structural systems in which the distribution parameters of random variables are described as interval variables.The proposed method may provide exact probabilistic interval reliability of structures whose random variables can have either a normal or abnormal distribution form.At last,we show the feasibility of the proposed approach through a typical example.
