To obtain high-power semiconductor lasers with stable operation in a single longitudinal mode and improve the characteristics of the output beam,an end-emitting surface second-order metal grating distributed feedback(...To obtain high-power semiconductor lasers with stable operation in a single longitudinal mode and improve the characteristics of the output beam,an end-emitting surface second-order metal grating distributed feedback(DFB) laser emitting at around 940 nm is fabricated.The characteristics of the uncoated devices with and without gratings are tested under room temperature continuous-wave conditions without any temperature-control device and compared.The devices with gratings achieve high powers of up to 385 mW/facet and a small lateral far-field angle of 2.7° at 1.5 A,have only 4.13 nm/A wavelength-shift,and 0.09 nm spectral linewidth at 600 mA,and operate in a stable longitudinal mode.Devices without gratings operate in multimode,with a larger lateral far-field angle(7.3°) and spectral linewidth(1.3 nm),although with higher output powers.Because of the integration of second-order metal gratings and their very high coupling capability,the output beam quality is improved greatly,the lasing wavelength is stable and varies slowly with changes in injection current,while the spectrum is narrowed dramatically,and the far-field angles are greatly reduced.This opens the way for the realization of watt-scale power broad-stripe(>100 μm) surface second-order metal grating end and surface-emitting DFB lasers and arrays with single frequency,single mode operation and high output beam quality.展开更多
According to the theory of DBR, with the P-type DBR as an example, the electrical characteristics and optical reflection of the DBR are analyzed by studying the energy band structure with various graded region widths ...According to the theory of DBR, with the P-type DBR as an example, the electrical characteristics and optical reflection of the DBR are analyzed by studying the energy band structure with various graded region widths and doping densities. The width and doping density of graded region are decided through a comparative study. The P-type DBR of 980 nm VCSELs is designed with Al0.9Ga0.1As and Al0.1Ga0.9As selected as the high and low refractive index material for the DBR. The 980 nm bottom VCSELs, which consists of 30 pairs P-type DBR and 28 pairs N-type DBR, are then fabricated. In P-type DBR, the width of graded region is 0.02 μm and the uniformity doping concentration is 2.5×10^18cm^-3. Its reflectivity is 99.9%. In N-type DBR, the width of graded region is also 0.02 μm and the uniformity doping concen- tration is 2×10^18cm^-3. Its reflectivity is 99.3%. The I-V curve shows that the series resistance of the device is about 0.05Ω. According to the theory of DBR, with the P-type DBR as an example, the electrical characteristics and optical reflection of the DBR are analyzed by studying the energy band structure with various graded region widths and doping densities. The width and doping density of graded region are decided through a comparative study. The P-type DBR of 980 nm VCSELs is designed, with Al0.9Ga0.1As and Al0.1Ga0.9As selected as the high and low refractive index material for the DBR. The 980 nm bottom VCSELs, which consist of 30 pairs P-type DBR and 28 pairs N-type DBR, are then fabricated. In P-type DBR, the width of graded region is 0.02μm and the uniformity doping concentration is 2.5×10^18cm^-3. Its reflectivity is 99.9%. In N-type DBR, the width of graded region is also 0.02 μm and the uniformity doping concentration is 2×10^18cm^-3. Its refiectivity is 99.3%. The I-V curve shows that the series resistance of the device is about 0.05Ω.展开更多
基金supported by the National Natural Science Foundation of China (90923037,61106068 and 61176045)
文摘To obtain high-power semiconductor lasers with stable operation in a single longitudinal mode and improve the characteristics of the output beam,an end-emitting surface second-order metal grating distributed feedback(DFB) laser emitting at around 940 nm is fabricated.The characteristics of the uncoated devices with and without gratings are tested under room temperature continuous-wave conditions without any temperature-control device and compared.The devices with gratings achieve high powers of up to 385 mW/facet and a small lateral far-field angle of 2.7° at 1.5 A,have only 4.13 nm/A wavelength-shift,and 0.09 nm spectral linewidth at 600 mA,and operate in a stable longitudinal mode.Devices without gratings operate in multimode,with a larger lateral far-field angle(7.3°) and spectral linewidth(1.3 nm),although with higher output powers.Because of the integration of second-order metal gratings and their very high coupling capability,the output beam quality is improved greatly,the lasing wavelength is stable and varies slowly with changes in injection current,while the spectrum is narrowed dramatically,and the far-field angles are greatly reduced.This opens the way for the realization of watt-scale power broad-stripe(>100 μm) surface second-order metal grating end and surface-emitting DFB lasers and arrays with single frequency,single mode operation and high output beam quality.
基金Supported partially by the National Natural Science Foundation of China (Grant Nos. 60636020, 60676034, 60577003, 60706007)
文摘According to the theory of DBR, with the P-type DBR as an example, the electrical characteristics and optical reflection of the DBR are analyzed by studying the energy band structure with various graded region widths and doping densities. The width and doping density of graded region are decided through a comparative study. The P-type DBR of 980 nm VCSELs is designed with Al0.9Ga0.1As and Al0.1Ga0.9As selected as the high and low refractive index material for the DBR. The 980 nm bottom VCSELs, which consists of 30 pairs P-type DBR and 28 pairs N-type DBR, are then fabricated. In P-type DBR, the width of graded region is 0.02 μm and the uniformity doping concentration is 2.5×10^18cm^-3. Its reflectivity is 99.9%. In N-type DBR, the width of graded region is also 0.02 μm and the uniformity doping concen- tration is 2×10^18cm^-3. Its reflectivity is 99.3%. The I-V curve shows that the series resistance of the device is about 0.05Ω. According to the theory of DBR, with the P-type DBR as an example, the electrical characteristics and optical reflection of the DBR are analyzed by studying the energy band structure with various graded region widths and doping densities. The width and doping density of graded region are decided through a comparative study. The P-type DBR of 980 nm VCSELs is designed, with Al0.9Ga0.1As and Al0.1Ga0.9As selected as the high and low refractive index material for the DBR. The 980 nm bottom VCSELs, which consist of 30 pairs P-type DBR and 28 pairs N-type DBR, are then fabricated. In P-type DBR, the width of graded region is 0.02μm and the uniformity doping concentration is 2.5×10^18cm^-3. Its reflectivity is 99.9%. In N-type DBR, the width of graded region is also 0.02 μm and the uniformity doping concentration is 2×10^18cm^-3. Its refiectivity is 99.3%. The I-V curve shows that the series resistance of the device is about 0.05Ω.
