Flexible tactile sensor has been extensively investigated as a key component for emerging electronics applications such as robotics,wearable devices,computer hardware,and security systems.Tactile sensors based on vari...Flexible tactile sensor has been extensively investigated as a key component for emerging electronics applications such as robotics,wearable devices,computer hardware,and security systems.Tactile sensors based on various one-dimensional materials have been widely explored.However,precise control of the direction and distribution of these nanomaterials remains a great challenge,and it has been difficult to scale down the device.Here,we introduce highly sensitive integrated flexible tactile sensors based on uniform phase-change Ge_(2)Sb_(2)Te_(5)(GST)thin films that can scale device size down,at least,to micrometer range.Significant piezoresistive effect has been observed in GST-based sensors,showing a giant gauge factor of 338.A proof of concept 5×5 sensor array functioning as a touch panel has been demonstrated.Also,the flexible GST tactile sensor has been utilized for monitoring of radial artery pulse.In addition to the well-known tunable electrical and optical properties,the piezoresistive GST films provide a versatile platform for the integration of sensing,recording,and displaying functions.展开更多
基金The work was financially supported by W.M.Keck Foundation.
文摘Flexible tactile sensor has been extensively investigated as a key component for emerging electronics applications such as robotics,wearable devices,computer hardware,and security systems.Tactile sensors based on various one-dimensional materials have been widely explored.However,precise control of the direction and distribution of these nanomaterials remains a great challenge,and it has been difficult to scale down the device.Here,we introduce highly sensitive integrated flexible tactile sensors based on uniform phase-change Ge_(2)Sb_(2)Te_(5)(GST)thin films that can scale device size down,at least,to micrometer range.Significant piezoresistive effect has been observed in GST-based sensors,showing a giant gauge factor of 338.A proof of concept 5×5 sensor array functioning as a touch panel has been demonstrated.Also,the flexible GST tactile sensor has been utilized for monitoring of radial artery pulse.In addition to the well-known tunable electrical and optical properties,the piezoresistive GST films provide a versatile platform for the integration of sensing,recording,and displaying functions.
