Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to en...Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.展开更多
The measurement of boreholes with diameters smaller than 500 μm is a demanding task that cannot be performed using state-of-the-art production metrology. In this letter, a miniaturized fiber probe with a diameter of...The measurement of boreholes with diameters smaller than 500 μm is a demanding task that cannot be performed using state-of-the-art production metrology. In this letter, a miniaturized fiber probe with a diameter of 80μm is presented. A probe is used for low-coherence interferometry to conduct highly precise measurements of form deviations of small boreholes. Measurements conducted in nozzles are also presented. The results prove the potential of the fiber-optical sensor for quality inspection of high-precision parts, such as injection nozzles, for common-rail diesel engines.展开更多
文摘Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.
基金the financial support of the German Ministry of Education and Science BMBF for the Project ‘Mikrofiz’ under Grant No. FKZ13N9495
文摘The measurement of boreholes with diameters smaller than 500 μm is a demanding task that cannot be performed using state-of-the-art production metrology. In this letter, a miniaturized fiber probe with a diameter of 80μm is presented. A probe is used for low-coherence interferometry to conduct highly precise measurements of form deviations of small boreholes. Measurements conducted in nozzles are also presented. The results prove the potential of the fiber-optical sensor for quality inspection of high-precision parts, such as injection nozzles, for common-rail diesel engines.
