Metal halide perovskite solar cells(PSCs)have made substantial progress in power conversion efficiency(PCE)and stability in the past decade thanks to the advancements in perovskite deposition methodology,charge transp...Metal halide perovskite solar cells(PSCs)have made substantial progress in power conversion efficiency(PCE)and stability in the past decade thanks to the advancements in perovskite deposition methodology,charge transport layer(CTL)optimization,and encapsulation technology.Solution-based methods have been intensively investigated and a 25.7% certified efficiency has been achieved.Vacuum vapor deposition protocols were less studied,but have nevertheless received increasing attention from industry and academia due to the great potential for large-area module fabrication,facile integration with tandem solar cell architectures,and compatibility with industrial manufacturing approaches.In this article,we systematically discuss the applications of several promising vacuum vapor deposition techniques,namely thermal evaporation,chemical vapor deposition(CVD),atomic layer deposition(ALD),magnetron sputtering,pulsed laser deposition(PLD),and electron beam evaporation(e-beam evaporation)in the fabrication of CTLs,perovskite absorbers,encapsulants,and connection layers for monolithic tandem solar cells.展开更多
基金financial support of the National Key Research and Development Program of China(2022YFB3803304)The project supported by Tsinghua University Initiative Scientific Research Program(20221080065,20223080044)+9 种基金National Natural Science Foundation of China(No.21872080)State Key Laboratory of Power System and Generation Equipment(Nos.SKLD21Z03 and SKLD20M03)The Chinese Thousand Talents Program for Young Professionals,State Grid Corporation of China,National Bio Energy Co.,Ltd.Grant Number 52789922000DChina Huaneng Group Co.,Ltd.,and grant no.HNKJ20-H88financial support of the European Research Council(ERC)under the European Union’s Horizon 2020 research and innovation programme(Grant agreement No.834431)the Spanish Agencia estatal de investigacion(AEI)Grant PDC2021-121317-I00funded by MCIN/AEI/10.13039/501100011033by the“European Union NextGenerationEU/PRTR”the support from the Energy Materials and Surface Sciences Unit of the Okinawa Institute of Science and Technology Graduate Universitythe support from the National Natural Science Foundation of China(No.52232008).
文摘Metal halide perovskite solar cells(PSCs)have made substantial progress in power conversion efficiency(PCE)and stability in the past decade thanks to the advancements in perovskite deposition methodology,charge transport layer(CTL)optimization,and encapsulation technology.Solution-based methods have been intensively investigated and a 25.7% certified efficiency has been achieved.Vacuum vapor deposition protocols were less studied,but have nevertheless received increasing attention from industry and academia due to the great potential for large-area module fabrication,facile integration with tandem solar cell architectures,and compatibility with industrial manufacturing approaches.In this article,we systematically discuss the applications of several promising vacuum vapor deposition techniques,namely thermal evaporation,chemical vapor deposition(CVD),atomic layer deposition(ALD),magnetron sputtering,pulsed laser deposition(PLD),and electron beam evaporation(e-beam evaporation)in the fabrication of CTLs,perovskite absorbers,encapsulants,and connection layers for monolithic tandem solar cells.
