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Fabrication and characterization of rugate structures composed of SiO_2 and Nb_2O_5 被引量:2
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作者 R. Leitel o. stenzel +3 位作者 S. Wilbrandt 1 D. Gbler V. Janicki N. Kaiser 《光学精密工程》 EI CAS CSCD 北大核心 2005年第4期505-511,共7页
Gradient index layers and rugate structures were fabricated on a Leybold Syrus pro deposition system by plasma-assisted coevaporation of the low index material silica and the high index material niobium pentoxide. To ... Gradient index layers and rugate structures were fabricated on a Leybold Syrus pro deposition system by plasma-assisted coevaporation of the low index material silica and the high index material niobium pentoxide. To obtain information about the compositional profiles of the produced layers, cross sectional transmission electron microscopy was used in assistance to deposition rate data recorded by two independent crystal monitors during the film preparation. The depth dependent concentration profiles were transformed to refractive index gradients by means of effective medium approximation. Based on the refractive index gradients the corresponding samples` transmission and reflection spectra could be calculated by utilizing matrix formalism. The relevance of the established refractive index profiles could be verified by comparison of the calculated spectra with the measured ones. 展开更多
关键词 SIO2 NB2O5 防反射涂层 光学薄膜 光谱分析 光电器件 SLD 剩余模态反射率 超发光二极管
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A hybrid algorithm for reengineering the refractive index profile of inhomogeneous coatings from optical in-situ broadband monitoring data
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作者 S. Wilbrandt o. stenzel +1 位作者 D. Gbler N. Kaiser 《光学精密工程》 EI CAS CSCD 北大核心 2005年第4期487-491,共5页
Reengineering the refractive index profile of inhomogeneous coatings is a troublesome task. Multiplicity of solutions may significantly reduced by providing additional information. For this reason an in-situ broadband... Reengineering the refractive index profile of inhomogeneous coatings is a troublesome task. Multiplicity of solutions may significantly reduced by providing additional information. For this reason an in-situ broadband monitoring system was developed to measure the transmittance of the growing film directly at the rotating substrate. For characterization of these coatings, a new model was developed, which significantly reduces the number of parameters. The refractive index profile may be described by a proper number of equally spaced volume fraction values using the Bruggeman effective media approach. A good initial approximation of the refractive index profile can be generated based on deposition rates for both materials recorded with quartz crystal monitor during manufacturing. During the optimization process, a second order minimization algorithm was used to vary the refractive index profile of the whole coating and film thickness of the intermediate stages. Finally, a significantly improved accuracy of the modelled transmittance was achieved. 展开更多
关键词 光学涂覆技术 折射率 宽带 混合模型 管理方式
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