|
1
|
A Generalized Analytical Model of a Multispecies Plasma Immersion Ion Implantation Process in a Collisionless System |
Dushyant Gupta
B. Prasad
Jyotika Jogi
p.j. george
|
《材料科学与工程（中英文B版）》
|
2011 |
1
|
|
|
2
|
A Comparative Study of Dynamic Sheath Analytical Models of a Multispecies Plasma Immersion Ion Implantation System in Collisionless Regime |
Dushyant Gupta
Jyotika Jogi
p.j. george
|
《材料科学与工程（中英文B版）》
|
2013 |
0 |
|
