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30 nm T-gate enhancement-mode InAIN/AIN/GaN HEMT on SiC substrates for future high power RF applications
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作者 p.murugapandiyan S.Ravimaran J.William 《Journal of Semiconductors》 EI CAS CSCD 2017年第8期22-27,共6页
The DC and RF performance of 30 nm gate length enhancement mode (E-mode) InAlN/AIN/GaN high electron mobility transistor (HEMT) on SiC substrate with heavily doped source and drain region have been inves- tigated ... The DC and RF performance of 30 nm gate length enhancement mode (E-mode) InAlN/AIN/GaN high electron mobility transistor (HEMT) on SiC substrate with heavily doped source and drain region have been inves- tigated using the Synopsys TCAD tool. The proposed device has the features of a recessed T-gate structure, lnGaN back barrier and Al2O3 passivated device surface. The proposed HEMT exhibits a maximum drain current density of 2.1 A/mm, transconductance gm of 1050 mS/mm, current gain cut-off frequency f of 350 GHz and power gain cut-off frequency fmax of 340 GHz. At room temperature the measured carrier mobility (μ), sheet charge carrier density (ns) and breakdown voltage are 1580 cm2/(V.s), 1.9× 1013 cm-2, and 10.7 V respectively. The superla- tives of the proposed HEMTs are bewitching competitor or future sub-millimeter wave high power RF VLSI circuit applications. 展开更多
关键词 HEMT back-barrier recessed gate cut-off frequency regrown ohmic contact short channel effects
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