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Highly ordered TiO_2 nano-pore arrays fabricated from a novel polymethylmethacrylate/polydimethylsiloxane soft template 被引量:1
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作者 p.zhong W.X.Que 《Nano-Micro Letters》 SCIE EI CAS 2010年第1期1-5,共5页
A novel soft polymer template containing a double-layer structure,which includes a thin layer of polymethylmethacrylate(PMMA)used as a pattern layer and a thicker layer of polydimethylsiloxane(PDMS)used as a back laye... A novel soft polymer template containing a double-layer structure,which includes a thin layer of polymethylmethacrylate(PMMA)used as a pattern layer and a thicker layer of polydimethylsiloxane(PDMS)used as a back layer,was fabricated from a replica molding process.Anodic aluminum oxide(AAO)template was used as the replica mold to be replicated to the polymethylmethacrylate layer by a thermal infiltration process under a vacuum condition.Results indicate that PMMA/PDMS soft templates with different sizes could be easily fabricated from the as-prepared AAO replica mold.The PMMA/PDMS soft templates were then employed to imprint a TiO_2 gel for achieving TiO_2 nano-pore arrays.After the imprinting process,the PDMS layer was firstly peeled off and the PMMA layer was then removed into acetonitrile,which can avoid any demolding problems like damages or distortions.The TiO_2 nano-pore arrays with the crystalline of anatase could be obtained at a heat treatment temperature of 450°C. 展开更多
关键词 Soft template Anodic aluminum oxide TiO2 nano-pore arrays NANOIMPRINT
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