A nanofabrication method for the production of ultra-dense planar metallic nanowire arrays scalable to wafer-size is presented. The method is based on an efficient template deposition process to grow diverse metallic ...A nanofabrication method for the production of ultra-dense planar metallic nanowire arrays scalable to wafer-size is presented. The method is based on an efficient template deposition process to grow diverse metallic nanowire arrays with extreme regularity in only two steps. First, Ⅲ-Ⅴ semiconductor substrates are irradiated by a low-energy ion beam at an elevated temperature, forming a highly ordered nanogroove pattern by a ＂reverse epitaxy＂ process due to self-assembly of surface vacancies. Second, diverse metallic nanowire arrays （Au, Fe, Ni, Co, FeAl alloy） are fabricated on these Ⅲ-Ⅴ templates by deposition at a glancing incidence angle. This method allows for the fabrication of metallic nanowire arrays with periodicities down to 45 nm scaled up to wafer-size fabrication. As typical noble and magnetic metals, the Au and Fe nanowire arrays produced here exhibited large anisotropic optical and magnetic properties, respectively. The excitation of localized surface plasmon resonances （LSPRs） of the Au nanowire arrays resulted in a high electric field enhancement, which was used to detect phthalocyanine （CoPc） in surface-enhanced Raman scattering （SERS）. Furthermore, the Fe nanowire arrays showed a very high in-plane magnetic anisotropy of approximately 412 mT, which may be the largest in-plane magnetic anisotropy field yet reported that is solely induced via shape anisotropy within the plane of a thin film.展开更多
基金This work was supported by the National Natural Science Foundation of China （Nos. 11622545 and U1732268）, One Hundred Talent Program of CAS and the Deutsche Forschungsgemeinschaft （No. LE2443/5-1）.
文摘A nanofabrication method for the production of ultra-dense planar metallic nanowire arrays scalable to wafer-size is presented. The method is based on an efficient template deposition process to grow diverse metallic nanowire arrays with extreme regularity in only two steps. First, Ⅲ-Ⅴ semiconductor substrates are irradiated by a low-energy ion beam at an elevated temperature, forming a highly ordered nanogroove pattern by a ＂reverse epitaxy＂ process due to self-assembly of surface vacancies. Second, diverse metallic nanowire arrays （Au, Fe, Ni, Co, FeAl alloy） are fabricated on these Ⅲ-Ⅴ templates by deposition at a glancing incidence angle. This method allows for the fabrication of metallic nanowire arrays with periodicities down to 45 nm scaled up to wafer-size fabrication. As typical noble and magnetic metals, the Au and Fe nanowire arrays produced here exhibited large anisotropic optical and magnetic properties, respectively. The excitation of localized surface plasmon resonances （LSPRs） of the Au nanowire arrays resulted in a high electric field enhancement, which was used to detect phthalocyanine （CoPc） in surface-enhanced Raman scattering （SERS）. Furthermore, the Fe nanowire arrays showed a very high in-plane magnetic anisotropy of approximately 412 mT, which may be the largest in-plane magnetic anisotropy field yet reported that is solely induced via shape anisotropy within the plane of a thin film.
