Hybrid laser technologies for deposition of thin films and basic schemes of combination of pulsed laser deposition (PLD) with magnetron sputtering and RF discharges or two lasers or three laser deposition systems are ...Hybrid laser technologies for deposition of thin films and basic schemes of combination of pulsed laser deposition (PLD) with magnetron sputtering and RF discharges or two lasers or three laser deposition systems are presented. Experiences with deposition of chromium doped diamond-like carbon (DLC) films for coating of prostheses are described. Layers of different chromium concentrations were prepared using hybrid systems (PLD + magnetron sputtering or by double PLD). Results of physical and mechanical characterization of film properties and biomedical tests of trivalent and toxic hexavalent chromium are given. Experiences with double laser deposition of DLC layers doped with silver are also mentioned.展开更多
文摘Hybrid laser technologies for deposition of thin films and basic schemes of combination of pulsed laser deposition (PLD) with magnetron sputtering and RF discharges or two lasers or three laser deposition systems are presented. Experiences with deposition of chromium doped diamond-like carbon (DLC) films for coating of prostheses are described. Layers of different chromium concentrations were prepared using hybrid systems (PLD + magnetron sputtering or by double PLD). Results of physical and mechanical characterization of film properties and biomedical tests of trivalent and toxic hexavalent chromium are given. Experiences with double laser deposition of DLC layers doped with silver are also mentioned.
