Double-sided nanostructure has more excellent properties in high efficiency,high yield,and high capability devices,which becomes the attention spots in nanofabrication technology.We proposed a very simple method to fa...Double-sided nanostructure has more excellent properties in high efficiency,high yield,and high capability devices,which becomes the attention spots in nanofabrication technology.We proposed a very simple method to fabricate the double-sided nanostructure on polymer elastic substrate.By using twice soft-nanoimprinting process,the same or different nanostructures array was fabricated onto the elastomeric slab substrate.In this paper,we fabricated double-sided nanopillars array with different diameters of 200nm and 350nm.In order to expand the applications field in optical and electronic devices,metal layer could be deposited onto the substrate before imprinting nanostructure.展开更多
This paper presents a method to design a monolithic complete-light modulator(MCLM) that fully controls the amplitude, phase, and polarization of incident light. The MCLM is made of birefringent materials that provide ...This paper presents a method to design a monolithic complete-light modulator(MCLM) that fully controls the amplitude, phase, and polarization of incident light. The MCLM is made of birefringent materials that provide different refractive indices to orthogonal eigen-polarizations, the ordinary o and extraordinary e states. We propose an optimization method to calculate the two relief depth distributions for the two eigen-polarizations. Also, a merging algorithm is proposed to combine the two relief depth distributions into one. The corresponding simulations were carried out in this work and the desired light distribution, including information on amplitude,phase, and four polarization states, was obtained when a laser beam passed through a 16-depth-level microstructure whose feature size is 8 μm. The structure was fabricated by common photolithography. An experimental optical system was also set up to test the optical effects and performances of the MCLM. The experimental performance of the MCLM agrees with the simulation results, which verifies the validity of the algorithms we propose in this paper.展开更多
基金the National Nature Science Foundation(No.61605211)of ChinaScience and Technology Support Program of Sichuan province(No.2016RZ0067).
文摘Double-sided nanostructure has more excellent properties in high efficiency,high yield,and high capability devices,which becomes the attention spots in nanofabrication technology.We proposed a very simple method to fabricate the double-sided nanostructure on polymer elastic substrate.By using twice soft-nanoimprinting process,the same or different nanostructures array was fabricated onto the elastomeric slab substrate.In this paper,we fabricated double-sided nanopillars array with different diameters of 200nm and 350nm.In order to expand the applications field in optical and electronic devices,metal layer could be deposited onto the substrate before imprinting nanostructure.
基金National Natural Science Foundation of China(NSFC)(61605211,51703227)Instrument Development of Chinese Academy of Sciences(YJKYYQ20180008)+3 种基金National R&D Program of China(2017YFC0804900)Sichuan Science and Technology Program(2019YJ0014)Youth Innovation Promotion Association,CASCAS “Light of West China” Program
文摘This paper presents a method to design a monolithic complete-light modulator(MCLM) that fully controls the amplitude, phase, and polarization of incident light. The MCLM is made of birefringent materials that provide different refractive indices to orthogonal eigen-polarizations, the ordinary o and extraordinary e states. We propose an optimization method to calculate the two relief depth distributions for the two eigen-polarizations. Also, a merging algorithm is proposed to combine the two relief depth distributions into one. The corresponding simulations were carried out in this work and the desired light distribution, including information on amplitude,phase, and four polarization states, was obtained when a laser beam passed through a 16-depth-level microstructure whose feature size is 8 μm. The structure was fabricated by common photolithography. An experimental optical system was also set up to test the optical effects and performances of the MCLM. The experimental performance of the MCLM agrees with the simulation results, which verifies the validity of the algorithms we propose in this paper.
