A SiGe/Si epilayer with a linear-step-graded buffer was grown by ultrahigh vacuum chemical vapor deposition technique at a relatively high growth temperature(780℃)and a relatively high growth rate.Almost linear Ge co...A SiGe/Si epilayer with a linear-step-graded buffer was grown by ultrahigh vacuum chemical vapor deposition technique at a relatively high growth temperature(780℃)and a relatively high growth rate.Almost linear Ge content variation was realized in the buffer layer due to the Ge segregation to the growing surface during epitaxial growth.Double crystal x-ray diffraction and Raman spectroscopy show that the upper layer is fully relaxed.However,the measured results show that the density of dislocation in the composition graded structure is much lower than that in single-step epilayer structures.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No.69686002the‘Talents Across the Century’of Education Ministry of Chinathe Natural Science Fund of Zhejiang Province.
文摘A SiGe/Si epilayer with a linear-step-graded buffer was grown by ultrahigh vacuum chemical vapor deposition technique at a relatively high growth temperature(780℃)and a relatively high growth rate.Almost linear Ge content variation was realized in the buffer layer due to the Ge segregation to the growing surface during epitaxial growth.Double crystal x-ray diffraction and Raman spectroscopy show that the upper layer is fully relaxed.However,the measured results show that the density of dislocation in the composition graded structure is much lower than that in single-step epilayer structures.
