Periodic microscale array structures play an important role in diverse applications involving photonic crystals and diffraction gratings.A polarized holographic lithography system is proposed for patterning high-unifo...Periodic microscale array structures play an important role in diverse applications involving photonic crystals and diffraction gratings.A polarized holographic lithography system is proposed for patterning high-uniformity microscale two-dimensional crossed-grating structures with periodic tunability.Orthogonal two-axis Lloyd’s mirror interference and polarization modulation produce three sub-beams,enabling the formation of two-dimensional crossed-grating patterns with wavelength-comparable periods by a single exposure.The two-dimensional-pattern period can also be flexibly tuned by adjusting the interferometer spatial positioning.Polarization states of three sub-beams,defining the uniformity of the interference fringes,are modulated at their initial-polarization states based on a strict full polarization tracing model in a three-dimensional space.A polarization modulation model is established considering two conditions of eliminating the unexpected interference and providing the desired identical interference intensities.The proposed system is a promising approach for fabricating high-uniformity two-dimensional crossed gratings with a relatively large grating period range of 500–1500 nm.Moreover,our rapid and stable approach for patterning period-tunable two-dimensional-array microstructures with high uniformity could be applicable to other multibeam interference lithography techniques.展开更多
基金The authors gratefully acknowledge the financial support from the National Natural Science Foundation of China(61905129,52005291)Shenzhen Fundamental Research Funding(JCYJ20170817160808432,JCYJ20180508152013054)+1 种基金Natural Science Foundation of Guangdong Province(2018A030313748)Start-up Funding of Tsinghua Shenzhen International Graduate School,Tsinghua University(QD2020001N).Part of this research work was performed at the Testing Technology Center of Materials and Devices of Tsinghua Shenzhen International Graduate School of Tsinghua University.
文摘Periodic microscale array structures play an important role in diverse applications involving photonic crystals and diffraction gratings.A polarized holographic lithography system is proposed for patterning high-uniformity microscale two-dimensional crossed-grating structures with periodic tunability.Orthogonal two-axis Lloyd’s mirror interference and polarization modulation produce three sub-beams,enabling the formation of two-dimensional crossed-grating patterns with wavelength-comparable periods by a single exposure.The two-dimensional-pattern period can also be flexibly tuned by adjusting the interferometer spatial positioning.Polarization states of three sub-beams,defining the uniformity of the interference fringes,are modulated at their initial-polarization states based on a strict full polarization tracing model in a three-dimensional space.A polarization modulation model is established considering two conditions of eliminating the unexpected interference and providing the desired identical interference intensities.The proposed system is a promising approach for fabricating high-uniformity two-dimensional crossed gratings with a relatively large grating period range of 500–1500 nm.Moreover,our rapid and stable approach for patterning period-tunable two-dimensional-array microstructures with high uniformity could be applicable to other multibeam interference lithography techniques.
