High-performance flexible pressure sensors provide comprehensive tactile perception and are applied in human activity monitoring,soft robotics,medical treatment,and human-computer interface.However,these flexible pres...High-performance flexible pressure sensors provide comprehensive tactile perception and are applied in human activity monitoring,soft robotics,medical treatment,and human-computer interface.However,these flexible pressure sensors require extensive nano-architectural design and complicated manufacturing and are timeconsuming.Herein,a highly sensitive,flexible piezoresistive tactile sensor is designed and fabricated,consisting of three main parts:the randomly distributed microstructure on T-ZnOw/PDMS film as a top substrate,multilayer Ti_(3)C_(2)-MXene film as an intermediate conductive filler,and the few-layer Ti_(3)C_(2)-MXene nanosheetbased interdigital electrodes as the bottom substrate.The MXene-based piezoresistive sensor with randomly distributed microstructure exhibits a high sensitivity over a broad pressure range(less than 10 kPa for 175 kPa^(-1))and possesses an out-standing permanence of up to 5000 cycles.Moreover,a 16-pixel sensor array is designed,and its potential applications in visualizing pressure distribution and an example of tactile feedback are demonstrated.This fully sprayed MXene-based pressure sensor,with high sensitivity and excellent durability,can be widely used in,electronic skin,intelligent robots,and many other emerging technologies.展开更多
基金supported by the Key Research and Development Program of Shanxi Province(No.202102130501011)the Fund for Shanxi“1331 Project”Key Subject Construction(1331KSC)National Key Research and Development Program of China(Grant No.2019YFB2004800).
文摘High-performance flexible pressure sensors provide comprehensive tactile perception and are applied in human activity monitoring,soft robotics,medical treatment,and human-computer interface.However,these flexible pressure sensors require extensive nano-architectural design and complicated manufacturing and are timeconsuming.Herein,a highly sensitive,flexible piezoresistive tactile sensor is designed and fabricated,consisting of three main parts:the randomly distributed microstructure on T-ZnOw/PDMS film as a top substrate,multilayer Ti_(3)C_(2)-MXene film as an intermediate conductive filler,and the few-layer Ti_(3)C_(2)-MXene nanosheetbased interdigital electrodes as the bottom substrate.The MXene-based piezoresistive sensor with randomly distributed microstructure exhibits a high sensitivity over a broad pressure range(less than 10 kPa for 175 kPa^(-1))and possesses an out-standing permanence of up to 5000 cycles.Moreover,a 16-pixel sensor array is designed,and its potential applications in visualizing pressure distribution and an example of tactile feedback are demonstrated.This fully sprayed MXene-based pressure sensor,with high sensitivity and excellent durability,can be widely used in,electronic skin,intelligent robots,and many other emerging technologies.