Over the past decade, ultraviolet(UV) detection has been a subject of major interest for both research scientists and engineers because of its important applications in both the civil and military fields. The rapid de...Over the past decade, ultraviolet(UV) detection has been a subject of major interest for both research scientists and engineers because of its important applications in both the civil and military fields. The rapid development of interdisciplinary research has enabled the realization of UV detectors based on a variety of principles. Among these devices, UV detectors based on surface acoustic wave(SAW) technology offer unique advantages of remote wireless operation capability and zero power consumption. This article provides a comprehensive review of the working principles, important parameters, and the acoustic wave and materials types used in SAW-based UV detectors. The research and development status of these detectors are discussed and the most commonly used methods to optimize device performance are also summarized. Novel types of acoustic UV detectors based on thin film bulk acoustic resonators(FBARs)and Lamb wave resonators(LMRs) are briefly introduced. Finally, future development challenges are proposed and suggestions for future directions are provided to aid the development of this important research field.展开更多
Bulk acoustic wave(BAW)filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard complementary metal-oxide-semiconductor(CMOS)compatible integr...Bulk acoustic wave(BAW)filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard complementary metal-oxide-semiconductor(CMOS)compatible integration process.However,it is challenging for a traditional aluminum nitride(AlN)-based BAW filter to meet several allocated 5G bands with more than a 5%fractional bandwidth via an acoustic-only approach.In this work,we propose an Al_(0.8)Sc_(0.2)N-based film bulk acoustic wave resonator(FBAR)for the design of radio frequency(RF)filters.By taking advantage of a high-quality Al_(0.8)Sc_(0.2)N thin film,the fabricated resonators demonstrate a large K_(eff)^(2) of 14.5%and an excellent figure of merit(FOM)up to 62.The temperature coefficient of frequency(TCF)of the proposed resonator is measured to be−19.2 ppm/℃,indicating excellent temperature stability.The fabricated filter has a center frequency of 4.24 GHz,a−3 dB bandwidth of 215 MHz,a small insertion loss(IL)of 1.881 dB,and a rejection>32 dB.This work paves the way for the realization of wideband acoustic filters operating in the 5G band.展开更多
基金This work was supported by China Scholarship Council,the National Natural Science Foundation of China(61974107)Hubei Provincial Major Program of Technological Innovation(2019AAA052,2017AAA121).
文摘Over the past decade, ultraviolet(UV) detection has been a subject of major interest for both research scientists and engineers because of its important applications in both the civil and military fields. The rapid development of interdisciplinary research has enabled the realization of UV detectors based on a variety of principles. Among these devices, UV detectors based on surface acoustic wave(SAW) technology offer unique advantages of remote wireless operation capability and zero power consumption. This article provides a comprehensive review of the working principles, important parameters, and the acoustic wave and materials types used in SAW-based UV detectors. The research and development status of these detectors are discussed and the most commonly used methods to optimize device performance are also summarized. Novel types of acoustic UV detectors based on thin film bulk acoustic resonators(FBARs)and Lamb wave resonators(LMRs) are briefly introduced. Finally, future development challenges are proposed and suggestions for future directions are provided to aid the development of this important research field.
基金the Fundamental Research Funds for the Central Universities under Grant No.2042022kf1027.
文摘Bulk acoustic wave(BAW)filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard complementary metal-oxide-semiconductor(CMOS)compatible integration process.However,it is challenging for a traditional aluminum nitride(AlN)-based BAW filter to meet several allocated 5G bands with more than a 5%fractional bandwidth via an acoustic-only approach.In this work,we propose an Al_(0.8)Sc_(0.2)N-based film bulk acoustic wave resonator(FBAR)for the design of radio frequency(RF)filters.By taking advantage of a high-quality Al_(0.8)Sc_(0.2)N thin film,the fabricated resonators demonstrate a large K_(eff)^(2) of 14.5%and an excellent figure of merit(FOM)up to 62.The temperature coefficient of frequency(TCF)of the proposed resonator is measured to be−19.2 ppm/℃,indicating excellent temperature stability.The fabricated filter has a center frequency of 4.24 GHz,a−3 dB bandwidth of 215 MHz,a small insertion loss(IL)of 1.881 dB,and a rejection>32 dB.This work paves the way for the realization of wideband acoustic filters operating in the 5G band.
