A weakly magnetized sheath for a collisionless, electronegative plasma comprising positive ions,electrons, and negative ions is investigated numerically using the fluid approach. The electrons are considered to be non...A weakly magnetized sheath for a collisionless, electronegative plasma comprising positive ions,electrons, and negative ions is investigated numerically using the fluid approach. The electrons are considered to be non-Maxwellian in nature and are described by Tsalli's distribution. Such electrons have a substantial effect on the sheath properties. The study also reveals that non-Maxwellian distribution is the most realistic description for negative ions in the presence of an oblique magnetic field. In addition to the negative ion temperature, the sheath potential is also affected by the nonextensive parameters. The present research finds application in the plasma processing and semiconductor industry as well as in space plasmas.展开更多
文摘A weakly magnetized sheath for a collisionless, electronegative plasma comprising positive ions,electrons, and negative ions is investigated numerically using the fluid approach. The electrons are considered to be non-Maxwellian in nature and are described by Tsalli's distribution. Such electrons have a substantial effect on the sheath properties. The study also reveals that non-Maxwellian distribution is the most realistic description for negative ions in the presence of an oblique magnetic field. In addition to the negative ion temperature, the sheath potential is also affected by the nonextensive parameters. The present research finds application in the plasma processing and semiconductor industry as well as in space plasmas.
