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The Influence of Deposition Parameters on the Microstructure and Deposition Mechanism of Low-temperature Isotropic Pyrocarbon on a Bed of Fluidized Particles
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作者 ZHANG Jian-hui ruan ye-peng +1 位作者 LUO Bi-hui ZHENG Yan-zhen 《Chinese Journal of Biomedical Engineering(English Edition)》 2019年第4期145-154,共10页
To investigate the microstructure and deposition mechanism of low-temperature isotropic pyrocarbon(LTIC),chemical vapour deposition was conducted in a steady-state fluidized bed using different propane concentrations ... To investigate the microstructure and deposition mechanism of low-temperature isotropic pyrocarbon(LTIC),chemical vapour deposition was conducted in a steady-state fluidized bed using different propane concentrations and deposition temperatures.The microstructure of LTIC obtained at different deposition conditions was characterized using scanning electron microscopy(SEM)and transmission electron microscopy(TEM).The results show that LTIC is composed of both globular-like and laminar structures.Increasing the deposition temperature is propitious for decreasing the nucleation barrier-forming pyrocarbon in vapour,causing the quantity of spherical particles with a smaller diameter to increase and the texture of the outer layer around carbon blacks inside the spherical particles to decrease gradually.Increasing the propane concentration also made the globular-like fracture morphology more obvious and caused the laminar structure to gradually disappear.Pyrocarbon formation is dominated by a surficial growth mechanism at lower propane concentrations,while gaseous nucleation mechanism is more dominant at higher propane concentrations. 展开更多
关键词 chemical vapour deposition fluidized bed low-temperature isotropic pyrocarbon(LTIC) deposition conditions MICROSTRUCTURE deposition mechanism
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