A novel plasma source suitable for controllable nanostructured thin film deposition processes is proposed. It exploits the separation of the process in two distinct phases. First precursor dissociation and radical for...A novel plasma source suitable for controllable nanostructured thin film deposition processes is proposed. It exploits the separation of the process in two distinct phases. First precursor dissociation and radical formation is performed in a dense oxidizing plasma. Then nucleation and aggregation of molecular clusters occur during the expansion into vacuum of a supersonic jet. This allows a superior control of cluster size and energy in the process of film growth. Characterization of the plasma state and source performances in precursor dissociation have been investigated. The performances of this new Plasma Assisted Supersonic Jet Deposition technique were demonstrated using organic compounds of titanium to obtain TiO2 thin nanostructured films.展开更多
Optical emission spectroscopy is a passive diagnostic technique,which does not perturb the plasma state.In particular,in a hydrogen plasma,Balmer-alpha（Hα） emission can be easily measured in the visible range along...Optical emission spectroscopy is a passive diagnostic technique,which does not perturb the plasma state.In particular,in a hydrogen plasma,Balmer-alpha（Hα） emission can be easily measured in the visible range along a line of sight from outside the plasma vessel.Other emission lines in the visible spectral range from hydrogen atoms and molecules can be exploited too,in order to gather complementary pieces of information on the plasma state.Tomography allows us to capture bi-dimensional structures.We propose to adopt an emission spectroscopy tomography for studying the transverse profiles of magnetized plasmas when Abel inversion is not exploitable.An experimental campaign was carried out at the Thorello device,a simple magnetized torus.The characteristics of the profile extraction method,which we implemented for this purpose are discussed,together with a few results concerning the plasma profiles in a simply magnetized torus configuration.展开更多
文摘A novel plasma source suitable for controllable nanostructured thin film deposition processes is proposed. It exploits the separation of the process in two distinct phases. First precursor dissociation and radical formation is performed in a dense oxidizing plasma. Then nucleation and aggregation of molecular clusters occur during the expansion into vacuum of a supersonic jet. This allows a superior control of cluster size and energy in the process of film growth. Characterization of the plasma state and source performances in precursor dissociation have been investigated. The performances of this new Plasma Assisted Supersonic Jet Deposition technique were demonstrated using organic compounds of titanium to obtain TiO2 thin nanostructured films.
文摘Optical emission spectroscopy is a passive diagnostic technique,which does not perturb the plasma state.In particular,in a hydrogen plasma,Balmer-alpha（Hα） emission can be easily measured in the visible range along a line of sight from outside the plasma vessel.Other emission lines in the visible spectral range from hydrogen atoms and molecules can be exploited too,in order to gather complementary pieces of information on the plasma state.Tomography allows us to capture bi-dimensional structures.We propose to adopt an emission spectroscopy tomography for studying the transverse profiles of magnetized plasmas when Abel inversion is not exploitable.An experimental campaign was carried out at the Thorello device,a simple magnetized torus.The characteristics of the profile extraction method,which we implemented for this purpose are discussed,together with a few results concerning the plasma profiles in a simply magnetized torus configuration.
