Comparison of heating mechanisms of argon helicon plasma in different wave modes with and without blue core

In this work,we investigated the discharge characteristics and heating mechanisms of argon helicon plasma in different wave coupled modes with and without blue core.Spatially resolved spectroscopy and emission intensity of argon atom and ion lines were measured via local optical emission spectroscopy,and electron density was measured experimentally by an RFcompensated Langmuir probe.The relation between the emission intensity and the electron density was obtained and the wavenumbers of helicon and’Trivelpiece-Gould’(TG)waves were calculated by solving the dispersion relation in wave modes.The results show that at least two distinct wave coupled modes appear in argon helicon plasma at increasing RF power,i.e.blue core(or BC)mode with a significant bright core of blue lights and a normal wave(NW)mode without blue core.The emission intensity of atom line 750.5 nm(lArⅠ750.5nm)is related to the electron density and tends to be saturated in wave coupled modes due to the neutral depletion,while the intensity of ion line 480.6 nm(IArⅡ480.6nm)is a function of the electron density and temperature,and increases dramatically as the RF power is increased.Theoretical analysis shows that TG waves are strongly damped at the plasma edge in NW and/or BC modes,while helicon waves are the dominant mechanism of power deposition or central heating of electrons in both modes.The formation of BC column mainly depends on the enhanced central electron heating by helicon waves rather than TG waves since the excitation of TG waves would be suppressed in this special anti-resonance region.

Observation of low-frequency oscillation in argon helicon discharge

We present here a kind of low-frequency oscillation in argon helicon discharge with a half helical antenna.This time-dependent instability shows a global quasi-periodic oscillation of plasma density and electron temperature,with a typical frequency of a few tens of Hz which increases with external magnetic field as well as radiofrequency(RF)power.The relative oscillation amplitude decreases with magnetic field and RF power,but the rising time and pulse width do not change significantly under different discharge conditions.The oscillation can only be observed in some specific conditions of low magnetic fields and low RF power when the gas flows in from one end of the discharge area and out from another end.This global instability is suggested to be attributed to the pressure instability of neutral depletion,which is the result of compound action of gas depletion by heating expansion and gas replenishment from upstream.There are two kinds of oscillations,large and small amplitude oscillations,occurring in different discharge modes.This study could be a good verification of and complement to earlier experiments.This kind of spontaneous pulse phenomenon is also helpful in realizing a pulsing plasma source without a pulsed power supply.

Axial profiles of argon helicon plasma by optical emission spectroscope and Langmuir probe

We present the axial profiles of argon helicon plasma measured by a local optical emission spectroscope(OES) and Langmuir RF-compensated probe. The results show that the emission intensity of the argon atom lines(750 nm, 811 nm) is proportional to the plasma density determined by the Langmuir probe. The axial profile of helicon plasma depends on the discharge mode which changes with the RF power. Excited by helical antenna, the axial distribution of plasma density is similar to that of the external magnetic field in the capacitive coupled mode(E-mode). As the discharge mode changes into the inductively coupled mode(H-mode), the axial distribution of plasma density in the downstream can still be similar to that of the external magnetic field, but becomes more uniform in the upstream. When the discharge entered wave coupled mode(W-mode), the plasma becomes nearly uniform along the axis, showing a completely different profile from the magnetic field. The W-mode is expected to be a mixed pattern of helicon(H) and Trivelpiece-Gould(TG) waves.

Comparison of double layer in argon helicon plasma and magnetized DC discharge plasma

We present in this paper the comparison of an electric double layer(DL)in argon helicon plasma and magnetized direct current(DC)discharge plasma.DL in high-density argon helicon plasma of 13.56 MHz RF discharge was investigated experimentally by a floating electrostatic probe and local optical emission spectroscopy(LOES).The DL characteristics at different operating parameters,including RF power(300-1500 W),tube diameter(8-60 mm),and external magnetic field(0-300 G),were measured.For comparison,DL in magnetized plasma channel of a DC discharge under different conditions was also measured experimentally.The results show that in both cases,DL appears in a divergent magnetic field where the magnetic field gradient is the largest and when the plasma density is sufficiently high.DL strength(or potential drop of DL)increases with the magnetic field in two different structures.It is suggested that the electric DL should be a common phenomenon in dense plasma under a gradient external magnetic field.DL in magnetized plasmas can be controlled properly by magnetic field structure and discharge mode(hence the plasma density).

Effect of magnetic field on double layer in argon helicon plasma

The electric double layer in argon helicon plasma by using floating electrostatic probe and local optical emission spectroscopy under different external magnetic field was investigated.Results show that electrons generated in the plasma source can be magnetized by the magnetic field and transported by the gradient of diverging magnetic field in the diffusion chamber,giving rise to the hollowed distribution of electron temperature.The electron temperature on axis has a sudden decrease,leading to the sudden decrease of plasma density as well as the plasma potential,forming a double layer structure.The position of double layer moves along with the position of diverging magnetic field,and the potential drop increases along with the strength of magnetic field.The structure of the external magnetic field plays the decisive factor for the double layer in helicon plasma.