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Low-temperature metal–oxide thin-film transistor technologies for implementing flexible electronic circuits and systems
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作者 runxiao shi Tengteng Lei +1 位作者 Zhihe Xia Man Wong 《Journal of Semiconductors》 EI CAS CSCD 2023年第9期3-10,共8页
Here we review two 300℃metal–oxide(MO)thin-film transistor(TFT)technologies for the implementation of flexible electronic circuits and systems.Fluorination-enhanced TFTs for suppressing the variation and shift of tu... Here we review two 300℃metal–oxide(MO)thin-film transistor(TFT)technologies for the implementation of flexible electronic circuits and systems.Fluorination-enhanced TFTs for suppressing the variation and shift of turn-on voltage(VON),and dual-gate TFTs for acquiring sensor signals and modulating VON have been deployed to improve the robustness and performance of the systems in which they are deployed.Digital circuit building blocks based on fluorinated TFTs have been designed,fabricated,and characterized,which demonstrate the utility of the proposed low-temperature TFT technologies for implementing flexible electronic systems.The construction and characterization of an analog front-end system for the acquisition of bio-potential signals and an active-matrix sensor array for the acquisition of tactile images have been reported recently. 展开更多
关键词 flexible electronics metal-oxide semiconductor thin-film transistor dual gate FLUORINATION analog front-end system sensors
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