A modeling method to extract the mechanical properties of ultra-thin films(10–100 nm thick) from experimental data generated by indentation of freestanding circular films using a spherical indenter is presented. The ...A modeling method to extract the mechanical properties of ultra-thin films(10–100 nm thick) from experimental data generated by indentation of freestanding circular films using a spherical indenter is presented. The relationship between the mechanical properties of the film and experimental parameters including load, and deflection are discussed in the context of a constitutive material model, test variables, and analytical approaches. Elastic and plastic regimes are identified by comparison of finite element simulation and experimental data.展开更多
基金the auspices of the U.S.Department of Energy by Lawrence Livermore National Laboratory under Contract DE-AC52-07NA27344funded by LLNL LDRD 14-ERD-025
文摘A modeling method to extract the mechanical properties of ultra-thin films(10–100 nm thick) from experimental data generated by indentation of freestanding circular films using a spherical indenter is presented. The relationship between the mechanical properties of the film and experimental parameters including load, and deflection are discussed in the context of a constitutive material model, test variables, and analytical approaches. Elastic and plastic regimes are identified by comparison of finite element simulation and experimental data.
