This work investigates internal plasma process parameters using a hairpin resonance probe and optical emission spectroscopy. The dependence of electron density and atomic fluorine on the percentage of oxygen in an SF6...This work investigates internal plasma process parameters using a hairpin resonance probe and optical emission spectroscopy. The dependence of electron density and atomic fluorine on the percentage of oxygen in an SF6/O2 discharge was measured using these methods. An RIE Oxford Instruments 80 plus chamber was used for the experiments. Two different process powers （100 W and 300 W） at a constant pressure （100 mTorr） were used, and it was found that the optical emission intensity of the 703.7 nm and 685.6 nm lines of atomic fluorine increased rapidly as oxygen was added to the SF6 discharge, reached their maximum at an O2 fraction of 20% and then decreased with further addition of oxygen. The plasma electron density was also strongly influenced by the addition of O2.展开更多
Plasma treatment can be used to modify the structure of natural fibre like jute for a variety of applications. Environmentally friendly jute fibre was treated with argon and oxygen plasma. The treated samples were cha...Plasma treatment can be used to modify the structure of natural fibre like jute for a variety of applications. Environmentally friendly jute fibre was treated with argon and oxygen plasma. The treated samples were characterized by X-ray diffraction （XRD）, Fourier transform infrared spectroscopy （FTIR） and optical microscope. The macromolecular and microstructural changes in cellulose confirmed the change by plasma treatment. The XRD results confirmed that the crystal size and the crystallinity of the plasma treated fibre increased. Argon plasma treated fibre had a smooth and compact surface, compared to oxygen plasma treated fibre. The maximum stain （i.e. stress） concentrated in the oxygen plasma treated fibre. Optical micrographs showed the oxygen plasma treated fibre tended to rupture due to higher strain （i.e., stress） compared to fibre with argon plasma treatment. FTIR results also provided the evidence of change in the chemical constituents with plasma treatment.展开更多
基金supported by the EC Framework 7 IMPROVE research project (IR -2008-0013)the Science Foundation Ireland PRECISION project (08-SRC-I1411)
文摘This work investigates internal plasma process parameters using a hairpin resonance probe and optical emission spectroscopy. The dependence of electron density and atomic fluorine on the percentage of oxygen in an SF6/O2 discharge was measured using these methods. An RIE Oxford Instruments 80 plus chamber was used for the experiments. Two different process powers （100 W and 300 W） at a constant pressure （100 mTorr） were used, and it was found that the optical emission intensity of the 703.7 nm and 685.6 nm lines of atomic fluorine increased rapidly as oxygen was added to the SF6 discharge, reached their maximum at an O2 fraction of 20% and then decreased with further addition of oxygen. The plasma electron density was also strongly influenced by the addition of O2.
文摘Plasma treatment can be used to modify the structure of natural fibre like jute for a variety of applications. Environmentally friendly jute fibre was treated with argon and oxygen plasma. The treated samples were characterized by X-ray diffraction （XRD）, Fourier transform infrared spectroscopy （FTIR） and optical microscope. The macromolecular and microstructural changes in cellulose confirmed the change by plasma treatment. The XRD results confirmed that the crystal size and the crystallinity of the plasma treated fibre increased. Argon plasma treated fibre had a smooth and compact surface, compared to oxygen plasma treated fibre. The maximum stain （i.e. stress） concentrated in the oxygen plasma treated fibre. Optical micrographs showed the oxygen plasma treated fibre tended to rupture due to higher strain （i.e., stress） compared to fibre with argon plasma treatment. FTIR results also provided the evidence of change in the chemical constituents with plasma treatment.
