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Optical Waveguide Formation in LiNbO_(3) by the 2.6 MeV Nickel Ions Implantation
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作者 HU Hui CHEN Feng +6 位作者 LU Fei ZHANG Jian-Hua LIU Ji-Tian WANG Ke-Ming shi bo-rong SHEN Ding-Yu WANG Xue-Mei 《Chinese Physics Letters》 SCIE CAS CSCD 2001年第2期242-244,共3页
The optical waveguide was formed on an LiNbO_(3) substrate by 2.6 MeV nickel ions implantation to the dose of 9×10^(14) ions/cm^(2).Five dark modes were observed by the prism coupling technique.The refractive ind... The optical waveguide was formed on an LiNbO_(3) substrate by 2.6 MeV nickel ions implantation to the dose of 9×10^(14) ions/cm^(2).Five dark modes were observed by the prism coupling technique.The refractive index profile was obtained by using the reflectivity calculation method.A large index decrease was found in the guiding region and in the optical barrier,which is somewhat different from that of the LiNbO_(3) waveguide formed by the MeV He+ions.The position of the optical barrier is deeper than that of the damage peak calculated by TRIM'90(Transport of Ions in Matter)code.The crystal lattice damage in the guiding region caused by the Ni+ion implantation was analysed by the Rutherford backscattering/channelling technique. 展开更多
关键词 technique WAVEGUIDE IMPLANTATION
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Splitting Behaviour of Implanted MeV Au^(+)Ions in LiB_(3)O_(5)
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作者 WANG Ke-ming shi bo-rong +5 位作者 Nelson Cue LU Fei WANG Feng-xiang XIE Zhao-xia SHEN Ding-yu LIU Yao-gang 《Chinese Physics Letters》 SCIE CAS CSCD 2000年第1期40-42,共3页
The diffusion behaviour of 1.0 and 2.0MeV Au^(+)implanted into LiB_(3)O_(5)single crystal has been studied by the Rutherford backscattering of 2.1 MeV He ions.Annealing was performed at temperatures of 600,700,and 800... The diffusion behaviour of 1.0 and 2.0MeV Au^(+)implanted into LiB_(3)O_(5)single crystal has been studied by the Rutherford backscattering of 2.1 MeV He ions.Annealing was performed at temperatures of 600,700,and 800℃each for 30 min.The results show that the diffusion behaviour is quite different in two cases.In LiB_(3)O_(5),the depth distribution of the 1.0MeV Au is nearly Gaussian and becomes bimodal after annealing at 800℃for 30 min.But in the case of 2.0 MeV,the depth distribution of as implanted Au^(+)in LiB_(3)O_(5)has splitting behaviour.After 800℃for 30 min annealing,there is no obvious diffusion observed.The precise interpretation is needed. 展开更多
关键词 diffusion ANNEALING BEHAVIOUR
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