Conventional servomotor and stepping motor face challenges in nanometer positioning stages due to the complex structure, motion transformation mechanism, and slow dynamic response, especially directly driven by linear...Conventional servomotor and stepping motor face challenges in nanometer positioning stages due to the complex structure, motion transformation mechanism, and slow dynamic response, especially directly driven by linear motor. A new butterfly-shaped linear piezoelectric motor for linear motion is presented. A two-degree precision position stage driven by the proposed linear ultrasonic motor possesses a simple and compact configuration, which makes the system obtain shorter driving chain. Firstly, the working principle of the linear ultrasonic motor is analyzed. The oscillation orbits of two driving feet on the stator are produced successively by using the anti-symmetric and symmetric vibration modes of the piezoelectric composite structure, and the slider pressed on the driving feet can be propelled twice in only one vibration cycle. Then with the derivation of the dynamic equation of the piezoelectric actuator and transient response model, start-upstart-up and settling state characteristics of the proposed linear actuator is investigated theoretically and experimentally, and is applicable to evaluate step resolution of the precision platform driven by the actuator. Moreover the structure of the two-degree position stage system is described and a special precision displacement measurement system is built. Finally, the characteristics of the two-degree position stage are studied. In the closed-loop condition the positioning accuracy of plus or minus 〈0.5 μm is experimentally obtained for the stage propelled by the piezoelectric motor. A precision position stage based the proposed butterfly-shaped linear piezoelectric is theoretically and experimentally investigated.展开更多
The high controllability and high resolution control of linear ultrasonic motors depend on effective control of driving signals.For a good control characteristic,step control which the driver output turned off and on ...The high controllability and high resolution control of linear ultrasonic motors depend on effective control of driving signals.For a good control characteristic,step control which the driver output turned off and on was used.Therefore,a novel dual PWM topology structure ultrasonic motor driver was designed and analyzed.According to the characteristics of the circuits,two kinds of hardware turned off methods named methods A and B were discussed.The differences of the voltage applied on motor by different methods were figured out.Finally,a series of experiments were carried out in the clean room to study the influence of step characteristic by different turn off methods.The experimental results show that the steplength was 230 nm by method A and 125 nm by method B,while cycles of driving signals were 6.The method B has a smaller steplength when cycles are 6.The average steplength varies in non-linear while driving cycles changing.The steplength varies approximately in linear while voltage amplitude changing.Therefore,method B is better to implement step control,because it gets a better control in positioning system.展开更多
A novel linear ultrasonic motor based on d15 effect of piezoelectric materials was presented. The design idea aimed at the direct utilization of the shear-induced vibration modes of piezoelectric material. Firstly, th...A novel linear ultrasonic motor based on d15 effect of piezoelectric materials was presented. The design idea aimed at the direct utilization of the shear-induced vibration modes of piezoelectric material. Firstly, the inherent electromechanical coupling mechanism of piezoelectric material was investigated, and shear vibration modes of a piezoelectric shear block was specially designed. A driving point’s elliptical trajectory induced by shear vibration modes was discussed. Then a dynamic model for the piezoelectric shear stator was established with finite element（FE） method to conduct the parametric optimal design. Finally, a prototype based on d15 converse piezoelectric effect is manufactured, and the modal experiment of piezoelectric stator was conducted with laser doppler vibrometer. The experimental results show that the calculated shear-induced vibration modes can be excited completely, and the new linear ultrasonic motor reaches a speed 118 mm/s at noload, and maximal thrust 12.8 N.展开更多
基金Supported by National Basic Research Program of China(973 Program,Grant No.2015CB057500)National Natural Science Foundation of China(Grant Nos.50305035,51575259)Research Fund of State Key Laboratory of Mechanics and Control of Mechanical Structures,China(Grant No.0315K01)
文摘Conventional servomotor and stepping motor face challenges in nanometer positioning stages due to the complex structure, motion transformation mechanism, and slow dynamic response, especially directly driven by linear motor. A new butterfly-shaped linear piezoelectric motor for linear motion is presented. A two-degree precision position stage driven by the proposed linear ultrasonic motor possesses a simple and compact configuration, which makes the system obtain shorter driving chain. Firstly, the working principle of the linear ultrasonic motor is analyzed. The oscillation orbits of two driving feet on the stator are produced successively by using the anti-symmetric and symmetric vibration modes of the piezoelectric composite structure, and the slider pressed on the driving feet can be propelled twice in only one vibration cycle. Then with the derivation of the dynamic equation of the piezoelectric actuator and transient response model, start-upstart-up and settling state characteristics of the proposed linear actuator is investigated theoretically and experimentally, and is applicable to evaluate step resolution of the precision platform driven by the actuator. Moreover the structure of the two-degree position stage system is described and a special precision displacement measurement system is built. Finally, the characteristics of the two-degree position stage are studied. In the closed-loop condition the positioning accuracy of plus or minus 〈0.5 μm is experimentally obtained for the stage propelled by the piezoelectric motor. A precision position stage based the proposed butterfly-shaped linear piezoelectric is theoretically and experimentally investigated.
基金supported by the National Science Foundation of China(No.51275235)
文摘The high controllability and high resolution control of linear ultrasonic motors depend on effective control of driving signals.For a good control characteristic,step control which the driver output turned off and on was used.Therefore,a novel dual PWM topology structure ultrasonic motor driver was designed and analyzed.According to the characteristics of the circuits,two kinds of hardware turned off methods named methods A and B were discussed.The differences of the voltage applied on motor by different methods were figured out.Finally,a series of experiments were carried out in the clean room to study the influence of step characteristic by different turn off methods.The experimental results show that the steplength was 230 nm by method A and 125 nm by method B,while cycles of driving signals were 6.The method B has a smaller steplength when cycles are 6.The average steplength varies in non-linear while driving cycles changing.The steplength varies approximately in linear while voltage amplitude changing.Therefore,method B is better to implement step control,because it gets a better control in positioning system.
基金Funded by the National Basic Research Program of China(973 Program,No.2015CB057501)the National Natural Science Foundation of China(Nos.50975135,51275235)+1 种基金the Fundamental Research Funds for the Central Universities(No.NJ20140024)the Priority Academic Program Development of Jiangsu Higher Education Institutions
文摘A novel linear ultrasonic motor based on d15 effect of piezoelectric materials was presented. The design idea aimed at the direct utilization of the shear-induced vibration modes of piezoelectric material. Firstly, the inherent electromechanical coupling mechanism of piezoelectric material was investigated, and shear vibration modes of a piezoelectric shear block was specially designed. A driving point’s elliptical trajectory induced by shear vibration modes was discussed. Then a dynamic model for the piezoelectric shear stator was established with finite element（FE） method to conduct the parametric optimal design. Finally, a prototype based on d15 converse piezoelectric effect is manufactured, and the modal experiment of piezoelectric stator was conducted with laser doppler vibrometer. The experimental results show that the calculated shear-induced vibration modes can be excited completely, and the new linear ultrasonic motor reaches a speed 118 mm/s at noload, and maximal thrust 12.8 N.
