The design of a maskless exposure system for fabricating the microstructured surface based on the grainy light illumination generated by laser speckle is reported. Upon combining with soft lithography, we obtained mic...The design of a maskless exposure system for fabricating the microstructured surface based on the grainy light illumination generated by laser speckle is reported. Upon combining with soft lithography, we obtained microstructured polydimethylsiloxane electrodes with microstructure sizes of 20 μm and 40 μm and microstructure fill factors ranging from 10% to 90%. The feasibility of using this method in fabricating high-sensitivity capacitive pressure sensors was demonstrated. The sensor shows the highest sensitivity of 2.14 k Pa-1under 0–100 Pa pressures, the low detection limit of 4.9 Pa, and the excellent stability and durability of 10000 cycles. The method of employing laser speckle in fabricating microstructures with different morphologies is simple and robust, which is superior to other methods such as traditional photolithography.展开更多
基金supported by the National Key Research and Development Program of China (Grant No. 2017YFA0304203)the Key Research and Development Program of Shanxi Province (Grant No. 202102030201002)+3 种基金the Changjiang Scholars and Innovative Research Team in University of Ministry of Education of China (Grant No. IRT_17R70)the State Key Program of National Natural Science of China (Grant No. 11434007)the111 Project (Grant No. D18001)the Fund for Shanxi “1331 Project”。
文摘The design of a maskless exposure system for fabricating the microstructured surface based on the grainy light illumination generated by laser speckle is reported. Upon combining with soft lithography, we obtained microstructured polydimethylsiloxane electrodes with microstructure sizes of 20 μm and 40 μm and microstructure fill factors ranging from 10% to 90%. The feasibility of using this method in fabricating high-sensitivity capacitive pressure sensors was demonstrated. The sensor shows the highest sensitivity of 2.14 k Pa-1under 0–100 Pa pressures, the low detection limit of 4.9 Pa, and the excellent stability and durability of 10000 cycles. The method of employing laser speckle in fabricating microstructures with different morphologies is simple and robust, which is superior to other methods such as traditional photolithography.