The green/blue photoluminescence with peaks centered around 2.4 eV at room temperature was observed from nanocrystalline Si thin films prepared by the three-step rapid thermal annealing of hydrogenated amorphous silic...The green/blue photoluminescence with peaks centered around 2.4 eV at room temperature was observed from nanocrystalline Si thin films prepared by the three-step rapid thermal annealing of hydrogenated amorphous silicon iilms.The effect of the parameters of rapid thermal annealing on the light emission was studied.A comparison of photoluminescence feature between the films from the rapid thermal annealing and the furnace annealing of a-Si:H has been earned out.展开更多
基金Supported by the National Natural Science Foundation of Chinathe Foundation of Graduate School of Academia Sinica.
文摘The green/blue photoluminescence with peaks centered around 2.4 eV at room temperature was observed from nanocrystalline Si thin films prepared by the three-step rapid thermal annealing of hydrogenated amorphous silicon iilms.The effect of the parameters of rapid thermal annealing on the light emission was studied.A comparison of photoluminescence feature between the films from the rapid thermal annealing and the furnace annealing of a-Si:H has been earned out.