A shape measurement based on ESPI by using carrier is presented. When the tested object is tilted with a small angle,the carrier pattern containing altitude information is formed on the object surface. By using the ca...A shape measurement based on ESPI by using carrier is presented. When the tested object is tilted with a small angle,the carrier pattern containing altitude information is formed on the object surface. By using the carrier pattern captured by a CCD camera,the phase of the object can be derived by Fourier transform and the shape measurement is realized. The principle of the method is introduced and proved by an experiment.展开更多
文摘A shape measurement based on ESPI by using carrier is presented. When the tested object is tilted with a small angle,the carrier pattern containing altitude information is formed on the object surface. By using the carrier pattern captured by a CCD camera,the phase of the object can be derived by Fourier transform and the shape measurement is realized. The principle of the method is introduced and proved by an experiment.
